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2019 (English)In: Journal of Materials Research, ISSN 0884-2914, E-ISSN 2044-5326, Vol. 34, no 22, p. 3735-3746Article in journal (Refereed) Published
Abstract [en]
The phase evolution of reactive radio frequency (RF) magnetron sputtered Cr0.28Zr0.10O0.61 coatings has been studied by in situ synchrotron X-ray diffraction during annealing under air atmosphere and vacuum. The annealing in vacuum shows t-ZrO2 formation starting at similar to 750-800 degrees C, followed by decomposition of the alpha-Cr2O3 structure in conjunction with bcc-Cr formation, starting at similar to 950 degrees C. The resulting coating after annealing to 1140 degrees C is a mixture of t-ZrO2, m-ZrO2, and bcc-Cr. The air-annealed sample shows t-ZrO2 formation starting at similar to 750 degrees C. The resulting coating after annealing to 975 degrees C is a mixture of t-ZrO2 and alpha-Cr2O3 (with dissolved Zr). The microstructure coarsened slightly during annealing, but the mechanical properties are maintained, with no detectable bcc-Cr formation. A larger t-ZrO2 fraction compared with alpha-Cr2O3 is observed in the vacuum-annealed coating compared with the air-annealed coating at 975 degrees C. The results indicate that the studied pseudo-binary oxide is more stable in air atmosphere than in vacuum.
Place, publisher, year, edition, pages
CAMBRIDGE UNIV PRESS, 2019
Keywords
physical vapor deposition (PVD); annealing; oxide
National Category
Materials Chemistry
Identifiers
urn:nbn:se:liu:diva-163680 (URN)10.1557/jmr.2019.340 (DOI)000510319300001 ()
Note
Funding Agencies|Swedish Research Council (VR)Swedish Research Council [621-20124368, 330-2014-6336]; Knut and Alice Wallenberg FoundationKnut & Alice Wallenberg Foundation; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University (Faculty Grant SFO-Mat-LiU) [2009 00971]; Marie Sklodowska Curie Actions, Cofund, Project INCA [600398]; Swedish Foundation for Strategic Research (SSF) through the Future Research Leaders 6 program; Swedish Research Council via the Rontgen Angstrom Cluster (RAC) Frame Program [2011-6505]; German Federal Ministry of Education and Research (BMBF)Federal Ministry of Education & Research (BMBF) [05K12CG1]
2020-02-172020-02-172022-12-19Bibliographically approved