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Tengdelius, Lina
Publications (10 of 15) Show all publications
Engberg, D. L. J., Tengdelius, L., Högberg, H., Thuvander, M. & Hultman, L. (2019). Atom probe tomography field evaporation characteristics and compositional corrections of ZrB2. Materials Characterization, 156, Article ID 109871.
Open this publication in new window or tab >>Atom probe tomography field evaporation characteristics and compositional corrections of ZrB2
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2019 (English)In: Materials Characterization, ISSN 1044-5803, E-ISSN 1873-4189, Vol. 156, article id 109871Article in journal (Refereed) Published
Abstract [en]

The microstructure of stoichiometric ZrB2.0 and B over-stoichiometric ZrB2.5 thin films has been studied using atom probe tomography (APT), X-ray diffraction, and transmission electron microscopy. Both films consist of columnar ZrB2 grains with AlB2-type crystal structure. The narrow stoichiometry range of ZrB2 results in the presence of separate disordered B-rich boundaries even in ZrB2.0. At higher average B content, specifically ZrB2.5, the formation of a continuous network around the sides of the ZrB2 columns is promoted. In addition, the APT field evaporation characteristics of ZrB2 and its influence on the measured local composition has been studied and compared to the average composition from elastic recoil detection analysis (ERDA). Differences in the measured average compositions of the two techniques are explained by the APT detector dead-time/space. A new pile-up pairs correction procedure based on co-evaporation correlation data was thus employed here for the APT data and compared with the 10B-method (the B equivalence of the 13C-method), as well as the combination of both methods. In ZrB2.0, all of the applied compositional correction methods were found to reduce the compositional difference when appropriate isotopic abundances were used. In ZrB2.5, the inhomogeneity of the film likely increased the local APT composition to such an extent that even conservative correction procedures overestimated the B content compared to the ERDA reference. The strengths of the pile-up pairs correction compared the 10B and the combined methods are higher precision, due to it being less dependent on the accuracy of estimated isotopic abundances, and that the correction itself is not dependent on careful background correction of the mass spectrum.

Place, publisher, year, edition, pages
Elsevier, 2019
Keywords
Atom probe tomography (APT), Zirconium diboride (ZrB), Field evaporation characteristics of borides, Elastic recoil detection analysis (ERDA), Compositional correction procedures, Transition metal diborides
National Category
Physical Sciences
Identifiers
urn:nbn:se:liu:diva-160356 (URN)10.1016/j.matchar.2019.109871 (DOI)000487565900025 ()
Available from: 2019-09-19 Created: 2019-09-19 Last updated: 2019-11-04Bibliographically approved
Magnuson, M., Tengdelius, L., Greczynski, G., Eriksson, F., Jensen, J., Lu, J., . . . Högberg, H. (2019). Compositional dependence of epitaxial Tin+1SiCn MAX-phase thin films grown from a Ti3SiC2 compound target. Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 37(2), Article ID 021506.
Open this publication in new window or tab >>Compositional dependence of epitaxial Tin+1SiCn MAX-phase thin films grown from a Ti3SiC2 compound target
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2019 (English)In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, E-ISSN 1520-8559, Vol. 37, no 2, article id 021506Article in journal (Refereed) Published
Abstract [en]

The authors investigate sputtering of a Ti3SiC2 compound target at temperatures ranging from RT (no applied external heating) to 970 °C as well as the influence of the sputtering power at 850 °C for the deposition of Ti3SiC2 films on Al2O3(0001) substrates. Elemental composition obtained from time-of-flight energy elastic recoil detection analysis shows an excess of carbon in all films, which is explained by differences in the angular distribution between C, Si, and Ti, where C scatters the least during sputtering. The oxygen content is 2.6 at. % in the film deposited at RT and decreases with increasing deposition temperature, showing that higher temperatures favor high purity films. Chemical bonding analysis by x-ray photoelectron spectroscopy shows C–Ti and Si–C bonding in the Ti3SiC2 films and Si–Si bonding in the Ti3SiC2 compound target. X-ray diffraction reveals that the phases Ti3SiC2, Ti4SiC3, and Ti7Si2C5 can be deposited from a Ti3SiC2 compound target at substrate temperatures above 850 °C and with the growth of TiC and the Nowotny phase Ti5Si3Cx at lower temperatures. High-resolution scanning transmission electron microscopy shows epitaxial growth of Ti3SiC2, Ti4SiC3, and Ti7Si2C5 on TiC at 970 °C. Four-point probe resistivity measurements give values in the range ∼120 to ∼450 μΩ cm and with the lowest values obtained for films containing Ti3SiC2, Ti4SiC3, and Ti7Si2C5.

Place, publisher, year, edition, pages
American Institute of Physics (AIP), 2019
National Category
Physical Sciences
Identifiers
urn:nbn:se:liu:diva-154004 (URN)10.1116/1.5065468 (DOI)000460437200051 ()
Note

Funding agencies: Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University (Faculty Grant SFO-Mat-LiU) [2009-00971]; Swedish Energy Research [43606-1]; Carl Tryggers Foundation [CTS16:303, CTS14:310, CTS 17:166]; Knut 

Available from: 2019-01-22 Created: 2019-01-22 Last updated: 2019-03-20Bibliographically approved
Magnuson, M., Tengdelius, L., Eriksson, F., Samuelsson, M., Broitman, E., Greczynski, G., . . . Högberg, H. (2019). Reactive magnetron sputtering of tungsten target in krypton/trimethylboron atmosphere. Thin Solid Films, 688, Article ID 137384.
Open this publication in new window or tab >>Reactive magnetron sputtering of tungsten target in krypton/trimethylboron atmosphere
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2019 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 688, article id 137384Article in journal (Refereed) Published
Abstract [en]

W-B-C films were deposited on Si(100) substrates held at elevated temperature by reactive sputtering from a W target in Kr/trimethylboron (TMB) plasmas. Quantitative analysis by Xray photoelectron spectroscopy (XPS) shows that the films are W-rich between ~ 73 and ~ 93 at.% W. The highest metal content is detected in the film deposited with 1 sccm TMB. The C and B concentrations increase with increasing TMB flow to a maximum of ~18 and ~7 at.%, respectively, while the O content remains nearly constant at 2-3 at.%. Chemical bonding structure analysis performed after samples sputter-cleaning reveals C-W and B-W bonding and no detectable W-O bonds. During film growth with 5 sccm TMB and 500 o C or with 10 sccm TMB and 300-600 o C thin film X-ray diffraction shows the formation of cubic 100-oriented WC1-x with a possible solid solution of B. Lower flows and lower growth temperatures favor growth of W and W2C, respectively. Depositions at 700 and 800 o C result in the formation of WSi2 due to a reaction with the substrate. At 900 o C, XPS analysis shows ~96 at.% Si in the film due to Si interdiffusion. Scanning electron microscopy images reveal a fine-grained microstructure for the deposited WC1-x films. Nanoindentation gives hardness values in the range from ~23 to ~31 GPa and reduced elastic moduli between ~220 and 280 GPa in the films deposited at temperatures lower than 600 o C. At higher growth temperatures the hardness decreases by a factor of 3 to 4 following the formation of WSi2 at 700-800 o C and Si-rich surface at 900 o C.

Place, publisher, year, edition, pages
Elsevier, 2019
Keywords
W-B-C films, reactive magnetron sputtering, trimethylboron, nanoindentation, Xray photoelectron spectroscopy, thin film X-ray diffraction, Scanning Electron Microscope
National Category
Inorganic Chemistry
Identifiers
urn:nbn:se:liu:diva-160243 (URN)10.1016/j.tsf.2019.06.034 (DOI)000485256500039 ()2-s2.0-85067891667 (Scopus ID)
Available from: 2019-09-13 Created: 2019-09-13 Last updated: 2019-11-14Bibliographically approved
Magnuson, M., Tengdelius, L., Greczynski, G., Hultman, L. & Högberg, H. (2018). ­Chemical Bonding in Epitaxial ZrB2 Studied by X-ray Spectroscopy. Thin Solid Films, 649, 89-96
Open this publication in new window or tab >>­Chemical Bonding in Epitaxial ZrB2 Studied by X-ray Spectroscopy
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2018 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 649, p. 89-96Article in journal (Refereed) Published
Abstract [en]

The chemical bonding in an epitaxial ZrB2 film is investigated by Zr K-edge (1s) X-ray absorption near-edge structure (XANES) and extended X-ray absorption fine structure (EXAFS) spectroscopies and compared to the ZrB2 compound target from which the film was synthesized as well as a bulk α-Zr reference. Quantitative analysis of X-ray Photoelectron Spectroscopy spectra reveals at the surface: ~5% O in the epitaxial ZrB2 film, ~19% O in the ZrB2 compound target and ~22% O in the bulk α-Zr reference after completed sputter cleaning. For the ZrB2 compound target, X-ray diffraction (XRD) shows weak but visible   11, 111, and 220 peaks from monoclinic ZrO2 together with peaks from ZrB2 and where the intensity distribution for the ZrB2 peaks show a randomly oriented target material.  For the bulk α-Zr reference no peaks from any crystalline oxide were visible in the diffractogram recorded from the 0001-oriented metal. The Zr K-edge absorption from the two ZrB2 samples demonstrate more pronounced oscillations for the epitaxial ZrB2 film than in the bulk ZrB2 attributed to the high atomic ordering within the columns of the film. The XANES exhibits no pre-peak due to lack of p-d hybridization in ZrB2, but with a chemical shift towards higher energy of 4 eV in the film and 6 eV for the bulk compared to α-Zr (17.993 keV) from the charge-transfer from Zr to B. The 2 eV larger shift in bulk ZrB2 material suggests higher oxygen content than in the epitaxial film, which is supported by XPS. In EXAFS, the modelled cell-edge in ZrB2 is slightly smaller in the thin film (a=3.165 Å, c=3.520 Å) in comparison to the bulk target material (a=3.175 Å, c=3.540 Å) while in hexagonal closest-packed metal (α-phase, a=3.254 Å, c=5.147 Å). The modelled coordination numbers show that the EXAFS spectra of the epitaxial ZrB2 film is highly anisotropic with strong in-plane contribution, while the bulk target material is more isotropic. The Zr-B distance in the film of 2.539 Å is in agreement with the calculated value from XRD data of 2.542 Å. This is slightly shorter compared to that in the ZrB2 compound target 2.599 Å, supporting the XANES results of a higher atomic order within the columns of the film compared to bulk ZrB2.

Place, publisher, year, edition, pages
Elsevier, 2018
Keywords
Zirconium boride, thin films, bond distances, chemical bonding, X-ray spectroscopy, X-ray photoelectron spectroscopy, X-ray diffraction
National Category
Physical Sciences
Identifiers
urn:nbn:se:liu:diva-144578 (URN)10.1016/j.tsf.2018.01.021 (DOI)000427524100015 ()
Note

Funding agencies: Swedish Energy Research [43606-1]; Swedish Foundation for Strategic Research (SSF) through the synergy grant FUNCASE [RMA11-0029]; Carl Trygger Foundation [CTS16:303, CTS14:310]; Swedish Research Council (VR) [621-2010 3921]; Knut and Alice Wallenberg Fou

Available from: 2018-01-29 Created: 2018-01-29 Last updated: 2018-11-29Bibliographically approved
Serban, A., Palisaitis, J., Junaid, M., Tengdelius, L., Högberg, H., Hultman, L., . . . Hsiao, C.-L. (2017). Magnetron Sputter Epitaxy of High-Quality GaN Nanorods on Functional and Cost-Effective Templates/Substrates. Energies, 10(9), Article ID 1322.
Open this publication in new window or tab >>Magnetron Sputter Epitaxy of High-Quality GaN Nanorods on Functional and Cost-Effective Templates/Substrates
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2017 (English)In: Energies, ISSN 1996-1073, E-ISSN 1996-1073, Vol. 10, no 9, article id 1322Article in journal (Refereed) Published
Abstract [en]

We demonstrate the versatility of magnetron sputter epitaxy by achieving high-quality GaN nanorods on different substrate/template combinations, specifically Si, SiC, TiN/Si, ZrB2/Si, ZrB2/SiC, Mo, and Ti. Growth temperature was optimized on Si, TiN/Si, and ZrB2/Si, resulting in increased nanorod aspect ratio with temperature. All nanorods exhibit high purity and quality, proved by the strong bandedge emission recorded with cathodoluminescence spectroscopy at room temperature as well as transmission electron microscopy. These substrates/templates are affordable compared to many conventional substrates, and the direct deposition onto them eliminates cumbersome post-processing steps in device fabrication. Thus, magnetron sputter epitaxy offers an attractive alternative for simple and affordable fabrication in optoelectronic device technology.

Place, publisher, year, edition, pages
Basel, Switzerland: MDPI AG, 2017
Keywords
GaN, nanorods, Si, SiC, Ti, Mo, TiN and ZrB2 templates, magnetron sputtering, epitaxy
National Category
Condensed Matter Physics
Identifiers
urn:nbn:se:liu:diva-141597 (URN)10.3390/en10091322 (DOI)000411225200078 ()2-s2.0-85029362447 (Scopus ID)
Note

Funding agencies: Swedish Research Council (VR) [621-2012-4420, 621-2013-5360, 2016-04412]; Swedish Governmental Agency for Innovation Systems (VINNOVA) under the VINNMER international qualification program; Swedish Foundation for Strategic Research (SSF) through the Resea

Available from: 2017-10-02 Created: 2017-10-02 Last updated: 2018-05-03Bibliographically approved
Tengdelius, L., Broitman, E., Lu, J., Eriksson, F., Birch, J., Nyberg, T., . . . Högberg, H. (2016). Hard and elastic epitaxial ZrB2 thin films on Al2O3(0001) substrates deposited by magnetron sputtering from a ZrB2 compound target. Acta Materialia, 111, 166-172
Open this publication in new window or tab >>Hard and elastic epitaxial ZrB2 thin films on Al2O3(0001) substrates deposited by magnetron sputtering from a ZrB2 compound target
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2016 (English)In: Acta Materialia, ISSN 1359-6454, E-ISSN 1873-2453, Vol. 111, p. 166-172Article in journal (Refereed) Published
Abstract [en]

Zirconium diboride (ZrB2) exhibits high hardness and high melting point, which is beneficial for applications in for e.g. metal cutting. However, there is limited data on the mechanical properties of ZrB2 films and no data on epitaxial films. In this study, ZrB2(0001) thin films, with thicknesses up to 1.2 μm, have been deposited on Al2O3(0001) substrates by direct current magnetron sputtering from a compound target. X-ray diffraction and transmission electron microscopy show that the films grow epitaxially with two domain types exhibiting different in-plane epitaxial relationships to the substrate. The out-of-plane epitaxial relationship was determined to ZrB2(0001)|Al2O3(0001) and the in-plane relationships of the two domains to ZrB2[100]‖Al2O3[100] and ZrB2[110]‖Al2O3[100]. Mechanical properties of the films, evaluated by nanoindentation, showed that all films exhibit hardness values above 45 GPa, a reduced Young's modulus in the range 350–400 GPa, and a high elastic recovery of 70% at an applied load of 9000 μN.

Place, publisher, year, edition, pages
Elsevier, 2016
Keywords
Borides, Epitaxial growth, Mechanical properties, Nanoindentation, Sputter deposition
National Category
Physical Sciences
Identifiers
urn:nbn:se:liu:diva-128612 (URN)10.1016/j.actamat.2016.03.064 (DOI)000375812100018 ()
Note

Funding agencies: Swedish Research Council (VR) [621-2010-3921]; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University [2009-00971]; Knut and Alice Wallenberg Foundation

Available from: 2016-05-25 Created: 2016-05-25 Last updated: 2017-11-30Bibliographically approved
Broitman, E., Tengdelius, L., Hangen, U. D., Lu, J., Hultman, L. & Högberg, H. (2016). High-temperature nanoindentation of epitaxial ZrB2 thin films. Scripta Materialia, 124, 117-120
Open this publication in new window or tab >>High-temperature nanoindentation of epitaxial ZrB2 thin films
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2016 (English)In: Scripta Materialia, ISSN 1359-6462, E-ISSN 1872-8456, Vol. 124, p. 117-120Article in journal (Refereed) Published
Abstract [en]

We use in-situ heated nanoindentation to investigate the high-temperature nanomechanical properties of epitaxial and textured ZrB2 films deposited by magnetron sputtering. Epitaxial films deposited on 4H-SiC(0001) show a hardness decrease from 47 GPa at room temperature to 33 GPa at 600 °C, while the reduced elastic modulus does not change significantly. High resolution electron microscopy (HRTEM) with selected area electron diffraction of the indented area in a 0001-textured film reveals a retained continuous ZrB2 film and no sign of crystalline phase transformation, despite massive deformation of the Si substrate. HRTEM analysis supports the high elastic recovery of 96% in the films.

Place, publisher, year, edition, pages
Elsevier, 2016
Keywords
Sputtering; Borides; Ceramic thin film; Nanoindentation; Transmission electron microscopy
National Category
Physical Sciences
Identifiers
urn:nbn:se:liu:diva-130917 (URN)10.1016/j.scriptamat.2016.06.033 (DOI)000383294200027 ()
Note

Funding agencies: Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University (Faculty Grant SFO-Mat-LiU) [2009-00971]; Swedish Research Council (VR) [621-2010-3921]

Available from: 2016-08-31 Created: 2016-08-31 Last updated: 2017-11-21Bibliographically approved
Tengdelius, L., Lu, J., Forsberg, U., Li, X., Hultman, L., Janzén, E. & Högberg, H. (2016). ZrB2 thin films deposited on GaN(0001) by magnetron sputtering from a ZrB2 target. Journal of Crystal Growth, 453, 71-76
Open this publication in new window or tab >>ZrB2 thin films deposited on GaN(0001) by magnetron sputtering from a ZrB2 target
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2016 (English)In: Journal of Crystal Growth, ISSN 0022-0248, E-ISSN 1873-5002, Vol. 453, p. 71-76Article in journal (Refereed) Published
Abstract [en]

ZrB2 films were deposited on 900 °C-preheated or non-preheated GaN(0001) surfaces by direct current magnetron sputtering from a compound target. Analytical transmission electron microscopy and scanning transmission electron microscopy with energy dispersive X-ray spectroscopy and electron energy loss spectroscopy revealed a 0001 fiber textured ZrB2 film growth following the formation of a ~2 nm thick amorphous BN layer onto the GaN(0001) at a substrate temperature of 900 °C. The amorphous BN layer remains when the substrate temperature is lowered to 500 °C or when the preheating step is removed from the process and results in the growth of polycrystalline ZrB2 films. The ZrB2 growth phenomena on GaN(0001) is compared to on 4H-SiC(0001), Si(111), and Al2O3(0001) substrates, which yield epitaxial film growth. The decomposition of the GaN surface during vacuum processing during BN interfacial layer formation is found to impede epitaxial growth of ZrB2.

Place, publisher, year, edition, pages
Elsevier, 2016
Keywords
A1. X-ray diffraction; A1. Interfaces; A1. Energy-dispersive X-ray spectroscopy; A1. Electron energy loss spectroscopy; A3. Physical vapor deposition processes; B1. Borides
National Category
Physical Sciences
Identifiers
urn:nbn:se:liu:diva-130920 (URN)10.1016/j.jcrysgro.2016.08.011 (DOI)000386984000012 ()
Available from: 2016-08-31 Created: 2016-08-31 Last updated: 2017-11-21Bibliographically approved
Tengdelius, L. (2016). ZrB2 Thin Films: Growth and Characterization. (Doctoral dissertation). Linköping: Linköping University Electronic Press
Open this publication in new window or tab >>ZrB2 Thin Films: Growth and Characterization
2016 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

Zirconium diboride, ZrB2, is a ceramic material with bulk properties such as high melting point (3245 °C), high hardness (23 GPa), and low resistivity (~8 μΩcm). Thin film growth of ZrB2 using physical vapor deposition has suffered from problems with films deviating from stoichiometry and with high levels of contaminants, especially high oxygen content. The homogeneity range of ZrB2 is very narrow, and consequently it is vital to achieve the correct stoichiometry to grow films with high crystalline order.

This thesis describes a direct current magnetron sputtering process to grow stoichiometric ZrB2 thin films with a low degree of impurities. Growth of epitaxial ZrB2 films was achieved on 4H-SiC(0001), Si(111) and Al2O3(0001) substrates. The effect of deposition temperature and power applied on the sputtering target was investigated and showed that high power density (8.77 Wcm-2) and high temperature (900 °C) resulted in films with the best composition and the highest crystal quality. ZrB2 films on GaN(0001) templates exhibit an amorphous layer at the film-substrate interface and the resulting films are either polycrystalline or textured.

Resistivity measurements showed that the ZrB2 thin films exhibit typical resistivity values of ~100-250 μΩcm and that the resistivity decreased with increasing deposition temperature.

Nanoindentation was applied to assess the mechanical properties of the films. The epitaxial ZrB2 films exhibit high elastic recovery and a hardness of ~45-50 GPa, twice as high as the literature bulk value. In addition, evaluation of the mechanical properties was performed at high temperatures of up to 600 °C and showed that the epitaxial films retained a higher hardness, compared to textured ZrB2 films and bulk, also at these temperatures.

Place, publisher, year, edition, pages
Linköping: Linköping University Electronic Press, 2016. p. 67
Series
Linköping Studies in Science and Technology. Dissertations, ISSN 0345-7524 ; 1744
National Category
Physical Sciences
Identifiers
urn:nbn:se:liu:diva-128614 (URN)10.3384/diss.diva-128614 (DOI)978-91-7685-833-2 (ISBN)
Public defence
2016-06-17, Planck, Fysikhuset, Campus Valla, Linköping, 09:15 (English)
Opponent
Supervisors
Available from: 2016-05-25 Created: 2016-05-25 Last updated: 2019-10-29Bibliographically approved
Tengdelius, L., Greczynski, G., Chubarov, M., Lu, J., Forsberg, U., Hultman, L., . . . Högberg, H. (2015). Stoichiometric, epitaxial ZrB2 thin films with low oxygen-content deposited by magnetron sputtering from a compound target: Effects of deposition temperature and sputtering power. Journal of Crystal Growth, 430, 55-62
Open this publication in new window or tab >>Stoichiometric, epitaxial ZrB2 thin films with low oxygen-content deposited by magnetron sputtering from a compound target: Effects of deposition temperature and sputtering power
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2015 (English)In: Journal of Crystal Growth, ISSN 0022-0248, E-ISSN 1873-5002, Vol. 430, p. 55-62Article in journal (Refereed) Published
Abstract [en]

Zirconium diboride (ZrB2) thin films have been deposited on 4H-SiC(0001) substrates by direct current magnetron sputtering from a compound target. The effect of deposition temperature (500-900 degrees C) and sputtering power (100-400 W) on the composition and structure of the films have been investigated. Electron microscopy and X-ray diffraction reveal that high sputtering power values and high deposition temperatures are favorable to enhance the crystalline order of the epitaxial 0001 oriented films. X-ray photoelectron spectroscopy shows that the composition of the films is near-stoichiometric for all deposition temperatures and for high sputtering power values of 300 W and 400 W, whereas under-stoichiometric films arc obtained when applying 100 W or 200 W. Decreasing the deposition temperature, or in particular the sputtering power, result in higher C and O impurity levels. The resistivity of the films was evaluated by four-point-probe measurements and found to scale with the amount of O impurities in the films. The lowest resistivity value obtained is 130 mu Omega cm, which makes the ZrB2 films interesting as an electrical contact material. (C) 2015 Elsevier B.V. All rights reserved.

Place, publisher, year, edition, pages
ELSEVIER SCIENCE BV, 2015
Keywords
X-ray diffraction; X-ray photoelectron spectroscopy; Physical vapor deposition processes; Borides
National Category
Physical Sciences Chemical Sciences
Identifiers
urn:nbn:se:liu:diva-122186 (URN)10.1016/j.jcrysgro.2015.08.012 (DOI)000362014800010 ()
Note

Funding Agencies|Swedish Research Council (VR) [621 2010-3921]; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University (Faculty Grant) [SFO-Mat-LiU 2009-00971]; VINN Excellence Center Functional Nanoscale Materials (FunMat) [2005-02666]; Knut and Alice Wallenberg Foundation [2011.0143]

Available from: 2015-10-26 Created: 2015-10-23 Last updated: 2017-12-01
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