liu.seSearch for publications in DiVA
Endre søk
RefereraExporteraLink to record
Permanent link

Direct link
Referera
Referensformat
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Annet format
Fler format
Språk
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Annet språk
Fler språk
Utmatningsformat
  • html
  • text
  • asciidoc
  • rtf
Gas rarefaction effects during high power pulsed magnetron sputtering of groups IVb and VIb transition metals in Ar
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska fakulteten.ORCID-id: 0000-0002-4898-5115
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska fakulteten.
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska fakulteten. University of Illinois, IL 61801 USA; University of Illinois, IL 61801 USA.
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska fakulteten. University of Illinois, IL 61801 USA; University of Illinois, IL 61801 USA; University of Illinois, IL 61801 USA.
Vise andre og tillknytning
2017 (engelsk)Inngår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, E-ISSN 1520-8559, Vol. 35, nr 6, artikkel-id 060601Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

The authors use energy- and time-dependent mass spectrometry to analyze the evolution of metal- and gas-ion fluxes incident at the substrate during high-power pulsed magnetron sputtering (HiPIMS) of groups IVb and VIb transition-metal (TM) targets in Ar. For all TMs, the time-and energy-integrated metal/gas-ion ratio at the substrate plane NMe+/NAr+ increases with increasing peak target current density J(T,peak) due to rarefaction. In addition, NMe+/NAr+ exhibits a strong dependence on metal/gas-atom mass ratio m(Me)/m(g) and varies from similar to 1 for Ti (m(Ti)/m(Ar) = 1.20) to similar to 100 for W (m(W)/m(Ar) = 4.60), with J(T,peak) maintained constant at 1 A/cm(2). Time-resolved ion-energy distribution functions confirm that the degree of rarefaction scales with m(Me)/m(g): for heavier TMs, the original sputtered-atom Sigmund-Thompson energy distributions are preserved long after the HiPIMS pulse, which is in distinct contrast to lighter metals for which the energy distributions collapse into a narrow thermalized peak. Hence, precise timing of synchronous substrate-bias pulses, applied in order to reduce film stress while increasing densification, is critical for metal/gas combinations with m(Me)/m(g) near unity, while with m(Me)/m(g) amp;gt;amp;gt; 1, the width of the synchronous bias pulse is essentially controlled by the metal-ion time of flight. The good agreement between results obtained in an industrial system employing 440 cm(2) cathodes and a laboratory-scale system with a 20 cm(2) target is indicative of the fundamental nature of the phenomena. 

sted, utgiver, år, opplag, sider
American Institute of Physics (AIP), 2017. Vol. 35, nr 6, artikkel-id 060601
Emneord [en]
Time of flight mass spectrometry, Metalloids, Wave mechanics, Physical vapor deposition, Semiconductor device fabrication
HSV kategori
Identifikatorer
URN: urn:nbn:se:liu:diva-143365DOI: 10.1116/1.4989674ISI: 000415685300001Scopus ID: 2-s2.0-85024128172OAI: oai:DiVA.org:liu-143365DiVA, id: diva2:1162790
Merknad

Funding Agencies|Swedish Research Council VR [2014-5790]; Aforsk Foundation [16-359]; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University [2009 00971]; Knut and Alice Wallenberg Foundation [KAW 2015.0043]

Tilgjengelig fra: 2017-12-05 Laget: 2017-12-05 Sist oppdatert: 2018-01-10bibliografisk kontrollert

Open Access i DiVA

fulltext(713 kB)62 nedlastinger
Filinformasjon
Fil FULLTEXT01.pdfFilstørrelse 713 kBChecksum SHA-512
2874c9596c166422246e2f8fc4890eb06802e4accd9ba34bba27427664353f4b98dc9f17eb872d468d876ac482686e7b7db036cff37a2d3fc0e915d8febe2269
Type fulltextMimetype application/pdf

Andre lenker

Forlagets fulltekstScopus

Personposter BETA

Greczynski, GrzegorzZhirkov, IgorPetrov, IvanGreene, Joseph ERosén, Johanna

Søk i DiVA

Av forfatter/redaktør
Greczynski, GrzegorzZhirkov, IgorPetrov, IvanGreene, Joseph ERosén, Johanna
Av organisasjonen
I samme tidsskrift
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films

Søk utenfor DiVA

GoogleGoogle Scholar
Totalt: 62 nedlastinger
Antall nedlastinger er summen av alle nedlastinger av alle fulltekster. Det kan for eksempel være tidligere versjoner som er ikke lenger tilgjengelige

doi
urn-nbn

Altmetric

doi
urn-nbn
Totalt: 116 treff
RefereraExporteraLink to record
Permanent link

Direct link
Referera
Referensformat
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Annet format
Fler format
Språk
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Annet språk
Fler språk
Utmatningsformat
  • html
  • text
  • asciidoc
  • rtf