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Progress of Ultra-Wide Bandgap Ga < sub > 2 </sub > O < sub > 3 </sub > Semiconductor Materials in Power MOSFETs
Xidian Univ, Peoples R China.
Xidian Univ, Peoples R China.
Xidian Univ, Peoples R China.
Xian Univ Technol, Peoples R China.
Vise andre og tillknytning
2020 (engelsk)Inngår i: IEEE transactions on power electronics, ISSN 0885-8993, E-ISSN 1941-0107, Vol. 35, nr 5, s. 5157-5179Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

As a promising ultra-wide bandgap semiconductor, the &lt;italic&gt;& x03B2;&lt;/italic&gt;-phase of Ga&lt;sub&gt;2&lt;/sub&gt;O&lt;sub&gt;3&lt;/sub&gt; has attracted more and more interest in the field of power electronics due to its ultra-wide bandgap (4.8 & x00A0;eV), high theoretical breakdown electric field (8 MV & x002F;cm), and large Baliga & x0027;s figure of merit, which is deemed as a potential candidate for next generation high-power electronics, including diodes, field effect transistors (FETs), etc. In this article, we introduce the basic material properties of Ga&lt;sub&gt;2&lt;/sub&gt;O&lt;sub&gt;3&lt;/sub&gt;, and review the recent progress and advances of &lt;italic&gt;& x03B2;&lt;/italic&gt;-Ga&lt;sub&gt;2&lt;/sub&gt;O&lt;sub&gt;3&lt;/sub&gt; based metal & x2013;oxide & x2013;semiconductor field-effect transistors (&lt;sc&gt;mosfet&lt;/sc&gt;s). Due to the problematic p-type doping technology up to now, the enhancement-mode (E-mode) &lt;italic&gt;& x03B2;&lt;/italic&gt;-Ga&lt;sub&gt;2&lt;/sub&gt;O&lt;sub&gt;3&lt;/sub&gt; FETs face more difficulties, compared with depletion mode (D-mode). This article focuses on reviewing the recent progress of E-mode Ga&lt;sub&gt;2&lt;/sub&gt;O&lt;sub&gt;3&lt;/sub&gt; &lt;sc&gt;mosfet&lt;/sc&gt;s, summarizing and comparing various feasible solutions when p-type doping is absent. Furthermore, the device fabrication and performances of state-of-art &lt;italic&gt;& x03B2;&lt;/italic&gt;-Ga&lt;sub&gt;2&lt;/sub&gt;O&lt;sub&gt;3&lt;/sub&gt; &lt;sc&gt;mosfet&lt;/sc&gt;s, including D-mode, E-mode, and planar & x002F;vertical structure are fully discussed and compared, as well as potential solutions to the challenges of Ga&lt;sub&gt;2&lt;/sub&gt;O&lt;sub&gt;3&lt;/sub&gt; FETs.

sted, utgiver, år, opplag, sider
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC , 2020. Vol. 35, nr 5, s. 5157-5179
Emneord [en]
Crystals; Silicon carbide; Gallium nitride; Thermal conductivity; Photonic band gap; Epitaxial growth; Conductivity; Gallium oxide (Ga2O3); power metal-oxide-semiconductor field-effect transistor (mosfet); power semiconductor devices; ultra wide band-gap (UWBG) semiconductor
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Identifikatorer
URN: urn:nbn:se:liu:diva-165934DOI: 10.1109/TPEL.2019.2946367ISI: 000530033300038OAI: oai:DiVA.org:liu-165934DiVA, id: diva2:1435152
Merknad

Funding Agencies|National Natural Science Foundation of ChinaNational Natural Science Foundation of China [61874084, 51711530035, 61704125]; Fundamental Research Funds for the Central UniversitiesFundamental Research Funds for the Central Universities [XJS191102]; Swedish Foundation for International Cooperation in Research and Higher Education [CH2016-6722]

Tilgjengelig fra: 2020-06-04 Laget: 2020-06-04 Sist oppdatert: 2021-12-29

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