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Thermal Stability and Phase Transformations of γ-/Amorphous-Al2O3 Thin Films
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska högskolan.ORCID-id: 0000-0003-1785-0864
Interdisciplinary Nanoscience Center (iNANO) and Department of Physics and Astronomy, University of Aarhus, DK-800 Aarhus C, Denmark.
Interdisciplinary Nanoscience Center (iNANO) and Department of Physics and Astronomy, University of Aarhus, DK-800 Aarhus C, Denmark.
Interdisciplinary Nanoscience Center (iNANO) and Department of Physics and Astronomy, University of Aarhus, DK-800 Aarhus C, Denmark.
2009 (engelsk)Inngår i: Plasma processes and polymers, ISSN 1612-8850, Vol. 6, nr 1, s. 907-911Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

Magnetron-sputtered Al2O3 thin films were annealed in ambient air. The phase compositions of the as-deposited Al2O3 films were (i) fully amorphous, (ii) nanocrystalline γ-Al2O3 in an amorphous Al2O3 matrix, and (iii) fully crystalline γ. For all samples, annealing to 1 100-1 150 °C resulted in a transformation to α-alumina. The transformation paths depend on the phase fraction of γ in the as-deposited films. For amorphous films and films with low initial γ fraction, the intermediate phase θ-Al2O3 appeared in the range of 1 000-1 100 °C. For predominantly crystalline γ-Al2O3 as-deposited films no intermediate Al2O3 phases were observed, indicating a direct γ-to-α phase transformation at ≈1 100 °C.

sted, utgiver, år, opplag, sider
Wiley , 2009. Vol. 6, nr 1, s. 907-911
Emneord [en]
annealing, atomic force microscopy (AFM), faceting, sputtering, X-ray diffraction (XRD)
HSV kategori
Identifikatorer
URN: urn:nbn:se:liu:diva-52722DOI: 10.1002/ppap.200932301OAI: oai:DiVA.org:liu-52722DiVA, id: diva2:285264
Tilgjengelig fra: 2010-01-11 Laget: 2010-01-11 Sist oppdatert: 2015-01-13

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