liu.seSearch for publications in DiVA
Endre søk
RefereraExporteraLink to record
Permanent link

Direct link
Referera
Referensformat
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Annet format
Fler format
Språk
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Annet språk
Fler språk
Utmatningsformat
  • html
  • text
  • asciidoc
  • rtf
Platinum zone plates for hard X-ray applications
Royal Institute Technology KTH.
Royal Institute Technology KTH.
Royal Institute Technology KTH.
Royal Institute Technology KTH.
Vise andre og tillknytning
2011 (engelsk)Inngår i: Microelectronic Engineering, ISSN 0167-9317, E-ISSN 1873-5568, Vol. 88, nr 10, s. 3123-3126Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

We describe the fabrication and evaluation of platinum zone plates for 5-12 kV X-ray imaging and focusing. These nano-scale circular periodic structures are fabricated by filling an e-beam generated mold with Pt in an electroplating process. The plating recipe is described. The resulting zone plates, having outer zone widths of 100 and 50 nm, show good uniformity and high aspect ratio. Their diffraction efficiencies are 50-70% of the theoretical, as measured at the European Synchrotron Radiation Facility. Platinum shows promise to become an attractive alternative to present hard X-ray zone plate materials due to its nano-structuring properties and the potential for zone-plate operation at higher temperatures.

sted, utgiver, år, opplag, sider
Elsevier , 2011. Vol. 88, nr 10, s. 3123-3126
Emneord [en]
Zone plate; Pt electroplating; X-ray optics; Electron beam lithography
HSV kategori
Identifikatorer
URN: urn:nbn:se:liu:diva-73345DOI: 10.1016/j.mee.2011.06.011ISI: 000297400900014OAI: oai:DiVA.org:liu-73345DiVA, id: diva2:471381
Tilgjengelig fra: 2012-01-02 Laget: 2012-01-02 Sist oppdatert: 2017-12-08

Open Access i DiVA

Fulltekst mangler i DiVA

Andre lenker

Forlagets fulltekst

Personposter BETA

Birch, Jens

Søk i DiVA

Av forfatter/redaktør
Birch, Jens
Av organisasjonen
I samme tidsskrift
Microelectronic Engineering

Søk utenfor DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric

doi
urn-nbn
Totalt: 242 treff
RefereraExporteraLink to record
Permanent link

Direct link
Referera
Referensformat
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Annet format
Fler format
Språk
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Annet språk
Fler språk
Utmatningsformat
  • html
  • text
  • asciidoc
  • rtf