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Synthesis and characterization of the mechanical and optical properties of Ca-Si-O-N thin films deposited by RF magnetron sputtering
Linnaeus University, Sweden; Corning Inc, NY 14831 USA.
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska fakulteten.
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska fakulteten.ORCID-id: 0000-0002-6371-0638
Linköpings universitet, Institutionen för fysik, kemi och biologi. Linköpings universitet, Tekniska fakulteten.ORCID-id: 0000-0003-3277-1945
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2017 (Engelska)Ingår i: Surface & Coatings Technology, ISSN 0257-8972, E-ISSN 1879-3347, Vol. 315, s. 88-94Artikel i tidskrift (Refereegranskat) Published
Abstract [en]

Ca-Si-O-N thin films were deposited on commercial soda-lime silicate float glass, silica wafers and sapphire substrates by RF magnetron co-sputtering from Ca and Si targets in an Ar/N-2/O-2 gas mixture. Chemical composition, surface morphology, hardness, reduced elastic modulus and optical properties of the films were investigated using X-ray photoelectron spectroscopy, scanning electron microscopy, nanoindentation, and spectroscopic ellipsometry. It was found that the composition of the films can be controlled by the Ca target power, predominantly, and by the reactive gas flow. Thin films in the Ca-Si-O-N system are composed of N and Ca contents up to 31 eq. % and 60 eq. %, respectively. The films thickness ranges from 600 to 3000 nm and increases with increasing Ca target power. The films surface roughness varied between 2 and 12 nm, and approximately decreases with increasing power of Ca target. The hardness (4-12 GPa) and reduced elastic modulus (65-145 GPa) of the films increase and decrease with the N and Ca contents respectively. The refractive index (1.56-1.82) is primarily dictated by the N content. The properties are compared with findings for bulk glasses in the Ca-Si-(Al)-O-N systems, and it is concluded that Ca-Si-O-N thin films have higher values of hardness, elastic modulus and refractive index than bulk glasses of similar composition. (C) 2017 Elsevier B.V. All rights reserved.

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ELSEVIER SCIENCE SA , 2017. Vol. 315, s. 88-94
Nyckelord [en]
Ca-Si-O-N thin films; Magnetron sputtering; High calcium content; Hardness; Elastic modulus; Refractive index
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Materialkemi
Identifikatorer
URN: urn:nbn:se:liu:diva-137389DOI: 10.1016/j.surfcoat.2017.02.033ISI: 000399268100010OAI: oai:DiVA.org:liu-137389DiVA, id: diva2:1096687
Anmärkning

Funding Agencies|AForsk Foundation [14-457]; Vinnova [2015-04809]; European Research Council under the European Commission Seventh Framework Programme (FP)/ERC [335383]; Swedish Foundation for Strategic Research (SSF) through the Future Research Leaders 5 Program; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University Faculty Grant SFO Mat LiU [2009 00971]

Tillgänglig från: 2017-05-18 Skapad: 2017-05-18 Senast uppdaterad: 2017-06-14

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