liu.seSök publikationer i DiVA
Ändra sökning
RefereraExporteraLänk till posten
Permanent länk

Direktlänk
Referera
Referensformat
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Annat format
Fler format
Språk
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Annat språk
Fler språk
Utmatningsformat
  • html
  • text
  • asciidoc
  • rtf
Structure and properties of Si-C-N and B-C-N thin films prepared by magnetron sputtering
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska högskolan.
2000 (Engelska)Licentiatavhandling, sammanläggning (Övrigt vetenskapligt)
Abstract [en]

Carbon nitride-based materials, grown by magnetron sputtering have been studied concerning microstructure and mechanical properties. Carbon nitride was alloyed with Si or B, and grown as a constituent in a layered structure. Si-C-N thin films have been deposited by reactive co-sputtering of C and Si targets and the composition, microstructure, mechanical response, as well as wetting behavior have been examined. The microstructure of these films showed to be amorphous-to-graphite-like for binary SiC and ternary SiCN with low Si content. For ternaries with "high" Si content a nanostructured material was observed, containing 2-20 nm-sized crystallites in an amorphous matrix. A small addition of Si have shown to affect the wettability of CNx, displaying contact angle values similar to what has been reported for Si-doped DLC. High hardness but less elasticity as compared to CNx has been noticed. B-C-N thin films were grown by reactive magnetron co-sputtering at low substrate-temperature. The microstructure and indentation response of these films have been studied. A large area of the B-C-N compositional diagram was covered by reactive co-sputtering of graphite and B4C-targets. The B-C-N films were shown to exhibit fullerene-like microstructure, regardless of composition. The films showed high elasticity, comparable to what has been reported for CNx films grown under similar conditions. CN0.33/BN:C multilayers have been grown by sequential magnetron sputtering. The films exhibited a fullerene-like microstructure, consisting of curved and cross-linked basal planes, which were found to be continuous over the interfaces of the layers. Multilayers of CN0.33/BN:C reached improved values of displacement and elastic recovery compared to what was found for single-layer CN0.33 and BN:C films grown under comparable conditions.

Ort, förlag, år, upplaga, sidor
Linköping: Linköpings universitet , 2000. , s. 27
Serie
Linköping Studies in Science and Technology. Thesis, ISSN 0280-7971 ; 816
Nationell ämneskategori
Naturvetenskap
Identifikatorer
URN: urn:nbn:se:liu:diva-145941Lokalt ID: LiU-TEK-LIC-2000:12ISBN: 9172196920 (tryckt)OAI: oai:DiVA.org:liu-145941DiVA, id: diva2:1199850
Tillgänglig från: 2018-04-23 Skapad: 2018-04-23 Senast uppdaterad: 2018-11-06Bibliografiskt granskad

Open Access i DiVA

Fulltext saknas i DiVA

Personposter BETA

Berlind, Torun

Sök vidare i DiVA

Av författaren/redaktören
Berlind, Torun
Av organisationen
TunnfilmsfysikTekniska högskolan
Naturvetenskap

Sök vidare utanför DiVA

GoogleGoogle Scholar

isbn
urn-nbn

Altmetricpoäng

isbn
urn-nbn
Totalt: 12 träffar
RefereraExporteraLänk till posten
Permanent länk

Direktlänk
Referera
Referensformat
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Annat format
Fler format
Språk
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Annat språk
Fler språk
Utmatningsformat
  • html
  • text
  • asciidoc
  • rtf