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Effect of Mo-Cu cathode composition on process stability, macroparticle formation, plasma generation, and thin-film deposition in DC arc synthesis
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska fakulteten.
PLANSEE Composite Mat GmbH, Germany.
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska fakulteten.
PLANSEE Composite Mat GmbH, Germany.
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2020 (Engelska)Ingår i: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 127, nr 1, artikel-id 013301Artikel i tidskrift (Refereegranskat) Published
Abstract [en]

In this work, we present the correlation between cathode composition and features of the arcing process for Mo1-xCux [x = 0.0, 0.07 (0.05), 0.14 (0.10), 0.21 (0.15), 0.40 (0.3), 0.73 (0.63), 0.97 (0.95), and 1.00, atomic fraction (weight fraction)] cathodes used in a DC vacuum-arc deposition system. It is found that the stability of the arcing process crucially depends on the cathode composition. The most stable arc spot and the lowest cathode potential (similar to 19 V) are detected for the Mo0.27Cu0.73 cathode, while the Mo0.93Cu0.07 cathode shows the most unstable arcing process with the highest cathode potential (similar to 28 V). The properties of the generated plasma are also strongly dependent on the relative ratio of the cathode elements. The metal ions from the Mo and Cu cathodes have peak kinetic energies around 136 and 62 eV, respectively, while for a Mo0.79Cu0.21 cathode, the corresponding energies are only 45 and 28 eV. The average charge states decreased from 2.1 to 1.6 for Mo ions and from 2 to 1.2 for Cu ions. The intensity of macroparticle generation and the size of the droplets correlate with the relative fraction of Cu. However, it is shown that, typically for the cathodes with a low amount of Cu, an increased abundance of visually observed macroparticles leads to droplet-free films. The film thicknesses and their compositions also demonstrate dependencies on the elemental composition of the cathode. These results are discussed in the light of no solubility between Mo and Cu and the high temperature of the cathode surface during the arcing process. Published under license by AIP Publishing.

Ort, förlag, år, upplaga, sidor
AMER INST PHYSICS , 2020. Vol. 127, nr 1, artikel-id 013301
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URN: urn:nbn:se:liu:diva-164398DOI: 10.1063/1.5128056ISI: 000515651000006OAI: oai:DiVA.org:liu-164398DiVA, id: diva2:1415794
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Funding Agencies|Knut and Alice Wallenberg (KAW) FoundationKnut & Alice Wallenberg Foundation [KAW 2015.0043]; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University (Faculty Grant SFO-Mat-LiU) [2009 00971]; Swedish Research CouncilSwedish Research Council [642-2013-8020]

Tillgänglig från: 2020-03-19 Skapad: 2020-03-19 Senast uppdaterad: 2020-04-17

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Publikationen är tillgänglig i fulltext från 2021-01-03 13:40
Tillgänglig från 2021-01-03 13:40

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Zhirkov, IgorPetruhins, AndrejsRosén, Johanna
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