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Efficient cleaning of graphene from residual lithographic polymers by ozone treatment
University of Crete, Greece; Research Institute Dev Science and Educ Potential Youth, Russia.
National Research Nucl University of MEPhI, Russia; Research Institute Dev Science and Educ Potential Youth, Russia.
National Research Nucl University of MEPhI, Russia; Research Institute Dev Science and Educ Potential Youth, Russia.
University of Toulouse, France.
Vise andre og tillknytning
2016 (engelsk)Inngår i: Carbon, ISSN 0008-6223, E-ISSN 1873-3891, Vol. 109, s. 221-226Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

We present an experimental study of time dependent ozone treatment on post-process epitaxial graphene using both electron transport measurements and resonant micro-Raman spectroscopy. We focus on a systematic analysis of residual polymer decomposition on the epitaxial graphene on SiC substrate. It was found that graphene could be effectively cleaned by ultraviolet (UV)/ozone treatment after nano fabrication from residual lithographic polymers. This procedure improves the charge carrier mobility, almost by a factor of two for strongly contaminated samples, decreases the doping level and does not introduce defect inside the graphene lattice. It was found that epitaxial SiC graphene is extremely stable when exposed to radical oxygen atoms. We ascribe this effect to the substrate topography, which significantly affects the graphene stability under UV/ozone treatment. Our calculations reveal that surface roughness of the SiC substrate can change the energy gain from epoxy group adsorption by a few tenths of electron volts. (C) 2016 Elsevier Ltd. All rights reserved.

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PERGAMON-ELSEVIER SCIENCE LTD , 2016. Vol. 109, s. 221-226
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Identifikatorer
URN: urn:nbn:se:liu:diva-132510DOI: 10.1016/j.carbon.2016.08.013ISI: 000385900100025OAI: oai:DiVA.org:liu-132510DiVA, id: diva2:1046502
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Funding Agencies|RFBR [16-32-60081 mol_a_dk]

Tilgjengelig fra: 2016-11-14 Laget: 2016-11-13 Sist oppdatert: 2017-11-29

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