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Impact of B4C co-sputtering on structure and optical performance of Cr/Sc multilayer X-ray mirrors
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska fakulteten.
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska fakulteten.
SLAC National Accelerator Laboratory, 2575 Sand Hill Road, Menlo Park, California, USA.
Center for X-Ray Optics, Lawrence Berkeley National Lab, Berkeley, California, USA.
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2017 (engelsk)Inngår i: Optics Express, ISSN 1094-4087, E-ISSN 1094-4087, Vol. 25, nr 15, s. 18274-18287Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

The influence of B4C incorporation during magnetron sputter deposition of Cr/Sc multilayers intended for soft X-ray reflective optics is investigated. Chemical analysis suggests formation of metal: boride and carbide bonds which stabilize an amorphous layer structure, resulting in smoother interfaces and an increased reflectivity. A near-normal incidence reflectivity of 11.7%, corresponding to a 67% increase, is achieved at λ = 3.11 nm upon adding 23 at.% (B + C). The advantage is significant for the multilayer periods larger than 1.8 nm, where amorphization results in smaller interface widths, for example, giving 36% reflectance and 99.89% degree of polarization near Brewster angle for a multilayer polarizer. The modulated ion-energy-assistance during the growth is considered vital to avoid intermixing during the interface formation even when B + C are added.

sted, utgiver, år, opplag, sider
Optical Society of America, 2017. Vol. 25, nr 15, s. 18274-18287
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URN: urn:nbn:se:liu:diva-139944DOI: 10.1364/oe.25.018274ISI: 000408584400128PubMedID: 28789315Scopus ID: 2-s2.0-85025823281OAI: oai:DiVA.org:liu-139944DiVA, id: diva2:1135067
Merknad

Funding agencies: Swedish Science Council; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University (Faculty Grant SFO-Mat-LiU) [2009 00971]

Tilgjengelig fra: 2017-08-22 Laget: 2017-08-22 Sist oppdatert: 2017-11-29bibliografisk kontrollert

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Ghafoor, NaureenEriksson, FredrikGreczynski, GrzegorzBirch, Jens

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