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One-step synthesis of polycrystalline V2AlC thin films on amorphous substrates by magnetron co-sputtering
Chinese Academic Science, Peoples R China; University of Chinese Academic Science, Peoples R China.
Chinese Academic Science, Peoples R China.
Chinese Academic Science, Peoples R China.
Chinese Academic Science, Peoples R China.
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2017 (Engelska)Ingår i: Vacuum, ISSN 0042-207X, E-ISSN 1879-2715, Vol. 146, s. 106-110Artikel i tidskrift (Refereegranskat) Published
Abstract [en]

We prepared V-Al-C films on glass and silicon (with native SiO2 layer) substrates using magnetron co-sputtering at 600 degrees C. The composition and microstructure of these films were characterized by Rutherford backscattering spectrometry, X-ray diffraction, Raman spectroscopy, and transmission electron microscopy. Polycrystalline V2AlC phase was obtained in the films with nearly stoichiometric composition. The microstructural evolution includes random nucleation at the film/substrate interface, competitive growth resulting in a (110) preferred orientation with increasing thickness. The mechanism for crystallization could be understood in terms of polymorphic crystallization. The results show that polycrystalline MAX-phase V2AlC could be directly synthesized on amorphous substrates. (C) 2017 Elsevier Ltd. All rights reserved.

Ort, förlag, år, upplaga, sidor
PERGAMON-ELSEVIER SCIENCE LTD , 2017. Vol. 146, s. 106-110
Nyckelord [en]
MAX phases; Magnetron co-sputtering; Non-epitaxial growth; Preferred orientation; Polymorphic crystallization
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URN: urn:nbn:se:liu:diva-143631DOI: 10.1016/j.vacuum.2017.08.049ISI: 000416184600016OAI: oai:DiVA.org:liu-143631DiVA, id: diva2:1165569
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Fall Meeting of the European-Materials-Research-Society (E-MRS Fall)
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Funding Agencies|National Natural Science Foundation of China [91226202, 91426304]; "Strategic Priority Research Program" of the Chinese Academy of Sciences [XDA 02040105, XDA03010305]; Major Project of the Ministry of Science and Technology of China [2015 ZX06004-001]; Swedish Foundation for Strategic Research through the Future Research Leaders 5 program; Synergy Grant FUNCASE

Tillgänglig från: 2017-12-13 Skapad: 2017-12-13 Senast uppdaterad: 2018-01-03

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