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Development of polypyrrole based solid state on-chip microactuators using photolithography
Linköping University, Department of Physics, Chemistry and Biology, Sensor and Actuator Systems. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0001-5602-8051
Linköping University, Department of Physics, Chemistry and Biology, Sensor and Actuator Systems. Linköping University, Faculty of Science & Engineering.
Linköping University, Department of Physics, Chemistry and Biology, Sensor and Actuator Systems. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0002-2071-7768
2018 (English)In: Smart materials and structures (Print), ISSN 0964-1726, E-ISSN 1361-665X, Vol. 27, no 7, article id 074006Article in journal (Refereed) Published
Abstract [en]

There is a need for soft microactuators, especially for biomedical applications. We have developed a microfabrication process to create such soft, on-chip polymer-based microactuators that can operate in air. The on-chip microactuators were fabricated using standard photolithographic techniques and wet etching, combined with special designed process to micropattern the electroactive polymer polypyrrole that drives the microactuators. By immobilizing a UV-patternable gel containing a liquid electrolyte on top of the electroactive polypyrrole layer, actuation in air was achieved although with reduced movement. Further optimization of the processing is currently on-going. The result shows the possibility to batch fabricate complex microsystems such as microrobotics and micromanipulators based on these solid state on-chip microactuators using microfabrication methods including standard photolithographic processes.

Place, publisher, year, edition, pages
Institute of Physics Publishing (IOPP), 2018. Vol. 27, no 7, article id 074006
National Category
Physical Sciences
Identifiers
URN: urn:nbn:se:liu:diva-147342DOI: 10.1088/1361-665X/aabe42ISI: 000434378700006OAI: oai:DiVA.org:liu-147342DiVA, id: diva2:1198912
Note

Funding agencies: European Union [641822]; SSF; VINNOVA (OBOE-Center for Organic Bioelectronics); Swedish Research Council [VR-2014-3079]

Available from: 2018-04-19 Created: 2018-04-19 Last updated: 2018-08-22Bibliographically approved

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