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Challenge in determining the crystal structure of epitaxial 0001 oriented sp(2)-BN films
Linköping University, Department of Physics, Chemistry and Biology. Linköping University, Faculty of Science & Engineering.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0001-5768-0244
Linköping University, Department of Physics, Chemistry and Biology, Chemistry. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0002-7171-5383
2018 (English)In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, E-ISSN 1520-8559, Vol. 36, no 3, article id 030801Article, review/survey (Refereed) Published
Abstract [en]

Boron nitride (BN) as a thin film is promising for many future electronic applications. On 0001 alpha-Al2O3 and 0001 4H/6H-SiC substrates, chemical vapor deposition yields epitaxial sp(2)-hybridized BN (sp(2)-BN) films oriented around the c-axis. Here, the authors seek to point out that sp(2)-BN can form two different polytypes; hexagonal BN (h-BN) and rhombohedral BN (r-BN), only differing in the stacking of the basal planes but with the identical distance between the basal planes and in-plane lattice parameters. This makes structural identification challenging in c- axis oriented films. The authors suggest the use of a combination of high-resolution electron microscopy with careful sample preparation and thin film x-ray diffraction techniques like pole figure measurements and glancing incidence (in-plane) diffraction to fully distinguish h-BN from r-BN. (C) 2018 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license.

Place, publisher, year, edition, pages
A V S AMER INST PHYSICS , 2018. Vol. 36, no 3, article id 030801
National Category
Inorganic Chemistry
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URN: urn:nbn:se:liu:diva-148102DOI: 10.1116/1.5024314ISI: 000432372400014OAI: oai:DiVA.org:liu-148102DiVA, id: diva2:1211327
Note

Funding Agencies|Swedish Research Council (VR) [621-2013-5585]; Carl Tryggers Stiftelse [12:175]; Swedish Foundation for Strategic Research [SSF IS-14-0024]; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University [SFO-Mat-LiU 2009-00971]

Available from: 2018-05-30 Created: 2018-05-30 Last updated: 2018-06-26

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Chubarov, MikhailHögberg, HansHenry, AnnePedersen, Henrik
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