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Atomic-scale diffusion rates during growth of thin metal films on weakly-interacting substrates
Linköpings universitet, Institutionen för fysik, kemi och biologi, Nanodesign. Linköpings universitet, Tekniska fakulteten. Univ Poitiers, France.ORCID-id: 0000-0003-2765-2271
Linköpings universitet, Institutionen för fysik, kemi och biologi, Teoretisk Fysik. Linköpings universitet, Tekniska fakulteten. Ruhr Univ Bochum, Germany.ORCID-id: 0000-0002-1379-6656
Univ Poitiers, France.
Linköpings universitet, Institutionen för fysik, kemi och biologi, Nanodesign. Linköpings universitet, Tekniska fakulteten.ORCID-id: 0000-0003-2864-9509
2019 (Engelska)Ingår i: Scientific Reports, ISSN 2045-2322, E-ISSN 2045-2322, Vol. 9, artikel-id 6640Artikel i tidskrift (Refereegranskat) Published
Abstract [en]

We use a combined experimental and theoretical approach to study the rates of surface diffusion processes that govern early stages of thin Ag and Cu film morphological evolution on weakly-interacting amorphous carbon substrates. Films are deposited by magnetron sputtering, at temperatures T-S between 298 and 413 K, and vapor arrival rates F in the range 0.08 to 5.38 monolayers/s. By employing in situ and real-time sheet-resistance and wafer-curvature measurements, we determine the nominal film thickness Theta at percolation (Theta(perc)) and continuous film formation (Theta(cont)) transition. Subsequently, we use the scaling behavior of Theta(perc) and Theta(cont) as a function of F and T-s, to estimate, experimentally, the temperature-dependent diffusivity on the substrate surface, from which we calculate Ag and Cu surface migration energy barriers E-D(exp) and attempt frequencies nu(exp)(0). By critically comparing E-D(exp) and nu(exp)(0) with literature data, as well as with results from our ab initio molecular dynamics simulations for single Ag and Cu adatom diffusion on graphite surfaces, we suggest that: (i) E-D(exp) and nu(exp)(0) correspond to diffusion of multiatomic clusters, rather than to diffusion of monomers; and (ii) the mean size of mobile clusters during Ag growth is larger compared to that of Cu. The overall results of this work pave the way for studying growth dynamics in a wide range of technologically-relevant weakly-interacting film/substrate systems-including metals on 2D materials and oxides-which are building blocks in next-generation nanoelectronic, optoelectronic, and catalytic devices.

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Nature Publishing Group, 2019. Vol. 9, artikel-id 6640
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Den kondenserade materiens fysik
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URN: urn:nbn:se:liu:diva-158369DOI: 10.1038/s41598-019-43107-8ISI: 000466127100065PubMedID: 31036908Scopus ID: 2-s2.0-85065068804OAI: oai:DiVA.org:liu-158369DiVA, id: diva2:1333826
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Funding Agencies|French Government program "Investissements dAvenir" (LABEX INTERACTIFS) [ANR-11-LABX-0017-01]; Linkoping University ("LiU Career Contract") [Dnr-LiU-2015-01510]; Swedish research council [VR-2015-04630]; Olle Engkvist foundation [SOEB 190-312]; Olle Engkvist Foundation

Tillgänglig från: 2019-07-02 Skapad: 2019-07-02 Senast uppdaterad: 2019-11-05Bibliografiskt granskad

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