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Growth and high temperature decomposition of epitaxial metastable wurtzite (Ti1-x,Al-x)N(0001) thin films
Linköpings universitet, Institutionen för fysik, kemi och biologi, Nanostrukturerade material. Linköpings universitet, Tekniska fakulteten. Univ Lorraine, France.
Linköpings universitet, Institutionen för fysik, kemi och biologi, Nanostrukturerade material. Linköpings universitet, Tekniska fakulteten. Saarland Univ, Germany.
SECO Tools AB, Sweden.
Univ Lorraine, France.
Vise andre og tillknytning
2019 (engelsk)Inngår i: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 688, artikkel-id 137414Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

The structure, growth, and phase stability of (Ti1-x,Al-x)N films with high Al content were investigated. (Ti1-x,Al-x)N (x= 0.63 and 0.77) thin films were grown on MgO (111) substrates at 700 degrees C using a UHV DC magnetron sputtering system. The (Ti-0.37,Al-0.63)N film is a single crystal with a cubic NaCl (B1) structure while the (T-i0.23,Al-0.77)N film only shows epitaxial growth of the same cubic phase in the first few atomic layers. With increasing film thickness, epitaxial wurtzite (B4) forms. The thin cubic layer and the wurtzite film has an orientation relationship of c-(Ti-0.23,Al-0.77)N(111)[110]parallel to w-(Ti-0.23,Al-0.77)N(0001)[11 (2) over bar0]. Continued deposition results in a gradual break-down of the epitaxial growth. It is replaced by polycrystalline growth of wurtzite columns with a high degree of 0001 texture, separated by a Tienriched cubic phase. In the as-deposited state, c-(Ti-0.27,Al-0.63)N displays a homogeneous chemical distribution while the w-(Ti-0.23,Al-0.77)N has segregated to Al- and Ti-rich domains. Annealing at 900 degrees C resulted in the spinodal decomposition of the metastable c-(Ti-0.27,Al-0.63)N film and formation of coherent elongated c-AlN and cTi-N-rich domains with an average width of 4.5 +/- 0.2 nm while the width of the domains in the w-(Ti-0.23,Al-0.77)N film only marginally increases to 2.8 +/- 0.1 nm. The slower coarsening rate of the wurtzite structure compared to cubic is indicative of a higher thermal stability.

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ELSEVIER SCIENCE SA , 2019. Vol. 688, artikkel-id 137414
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URN: urn:nbn:se:liu:diva-160968DOI: 10.1016/j.tsf.2019.137414ISI: 000485256500022OAI: oai:DiVA.org:liu-160968DiVA, id: diva2:1370254
Merknad

Funding Agencies|European Unions Erasmus Mundus doctoral program in Materials Science and Engineering (DocMASE)European Union (EU); Swedish Research CouncilSwedish Research Council [2017-03813]; Swedish Government Strategic Research area grant AFM - SFO MatLiU [2009-00971]; VINNOVA (FunMat-II project)Vinnova [2016-05156]

Tilgjengelig fra: 2019-11-14 Laget: 2019-11-14 Sist oppdatert: 2019-11-14

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Calamba, KatherineBarrirero, JeniferBoyd, RobertLe Febvrier, ArnaudOdén, Magnus
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