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Growth and high temperature decomposition of epitaxial metastable wurtzite (Ti1-x,Al-x)N(0001) thin films
Linköping University, Department of Physics, Chemistry and Biology, Nanostructured Materials. Linköping University, Faculty of Science & Engineering. Univ Lorraine, France.
Linköping University, Department of Physics, Chemistry and Biology, Nanostructured Materials. Linköping University, Faculty of Science & Engineering. Saarland Univ, Germany.
SECO Tools AB, Sweden.
Univ Lorraine, France.
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2019 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 688, article id 137414Article in journal (Refereed) Published
Abstract [en]

The structure, growth, and phase stability of (Ti1-x,Al-x)N films with high Al content were investigated. (Ti1-x,Al-x)N (x= 0.63 and 0.77) thin films were grown on MgO (111) substrates at 700 degrees C using a UHV DC magnetron sputtering system. The (Ti-0.37,Al-0.63)N film is a single crystal with a cubic NaCl (B1) structure while the (T-i0.23,Al-0.77)N film only shows epitaxial growth of the same cubic phase in the first few atomic layers. With increasing film thickness, epitaxial wurtzite (B4) forms. The thin cubic layer and the wurtzite film has an orientation relationship of c-(Ti-0.23,Al-0.77)N(111)[110]parallel to w-(Ti-0.23,Al-0.77)N(0001)[11 (2) over bar0]. Continued deposition results in a gradual break-down of the epitaxial growth. It is replaced by polycrystalline growth of wurtzite columns with a high degree of 0001 texture, separated by a Tienriched cubic phase. In the as-deposited state, c-(Ti-0.27,Al-0.63)N displays a homogeneous chemical distribution while the w-(Ti-0.23,Al-0.77)N has segregated to Al- and Ti-rich domains. Annealing at 900 degrees C resulted in the spinodal decomposition of the metastable c-(Ti-0.27,Al-0.63)N film and formation of coherent elongated c-AlN and cTi-N-rich domains with an average width of 4.5 +/- 0.2 nm while the width of the domains in the w-(Ti-0.23,Al-0.77)N film only marginally increases to 2.8 +/- 0.1 nm. The slower coarsening rate of the wurtzite structure compared to cubic is indicative of a higher thermal stability.

Place, publisher, year, edition, pages
ELSEVIER SCIENCE SA , 2019. Vol. 688, article id 137414
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Inorganic Chemistry
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URN: urn:nbn:se:liu:diva-160968DOI: 10.1016/j.tsf.2019.137414ISI: 000485256500022OAI: oai:DiVA.org:liu-160968DiVA, id: diva2:1370254
Note

Funding Agencies|European Unions Erasmus Mundus doctoral program in Materials Science and Engineering (DocMASE)European Union (EU); Swedish Research CouncilSwedish Research Council [2017-03813]; Swedish Government Strategic Research area grant AFM - SFO MatLiU [2009-00971]; VINNOVA (FunMat-II project)Vinnova [2016-05156]

Available from: 2019-11-14 Created: 2019-11-14 Last updated: 2019-11-14

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Calamba, KatherineBarrirero, JeniferBoyd, RobertLe Febvrier, ArnaudOdén, Magnus
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