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High-power impulse magnetron sputter deposition of TiBx thin films: Effects of pressure and growth temperature
Messiah Coll, PA 17055 USA.
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska fakulteten.
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska fakulteten.
Uppsala Univ, Sweden.
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2019 (Engelska)Ingår i: Vacuum, ISSN 0042-207X, E-ISSN 1879-2715, Vol. 169, artikel-id UNSP 108884Artikel i tidskrift (Refereegranskat) Published
Abstract [en]

Titanium boride, TiBx thin films are grown in pure Ar discharges by high-power impulse magnetron sputtering (HiPIMS) from a compound TiB2 target Film compositions are determined by time-of-flight elastic recoil detection analysis and Rutherford backscattering spectrometry as a function of deposition temperature (T-s = 25-900 degrees C) and Ar pressure (p(Ar) = 0.67-2.67 Pa, 5-20 mTorr). For reference, films are also grown by direct current magnetron sputtering (dcMS) under similar conditions. The HiPIMS waveform, average target power P-T, and resulting film compositions are strongly dependent not only on P-Ar, but also on T-s. At high pressures the effect of varying T-s on P-T is minimal, while at lower P-Ar the effect of T-s is more pronounced, due to substrate-temperature-induced gas rarefaction. Films grown by HiPIMS at 0.67 Pa are understoichiometric, with B/Ti = 1.4-1.5, while at 2.67 Pa, B/Ti decreases from 2.4 to 1.4 as T-s increases from 25 to 900 degrees C. dcMS-deposited films are overstoichiometric (B/Ti similar or equal to 3) when grown at low pressures, and near-stoichiometric (B/Ti similar or equal to r 1.9-2.2) for higher P-Ar. All experimental results are explained by differences in the ionization potentials of sputtered Ti and B atoms, together with P-Ar- and T-s-dependent gas-phase scattering.

Ort, förlag, år, upplaga, sidor
PERGAMON-ELSEVIER SCIENCE LTD , 2019. Vol. 169, artikel-id UNSP 108884
Nyckelord [en]
Titanium diboride; HiPIMS; Ionization; Gas phase transport; Stoichiometry
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Den kondenserade materiens fysik
Identifikatorer
URN: urn:nbn:se:liu:diva-162331DOI: 10.1016/j.vacuum.2019.108884ISI: 000494887000024OAI: oai:DiVA.org:liu-162331DiVA, id: diva2:1374072
Anmärkning

Funding Agencies|Knut and Alice Wallenberg (KAW) FoundationKnut & Alice Wallenberg Foundation [KAW 2015.0043]; Swedish Foundation for Strategic ResearchSwedish Foundation for Strategic Research [RIF14-0053]; VR-RFI [2017-00646_9]

Tillgänglig från: 2019-11-28 Skapad: 2019-11-28 Senast uppdaterad: 2019-11-28

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Thörnberg, JimmyZhirkov, IgorPetrov, IvanGreene, Joseph EHultman, LarsRosén, Johanna
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