liu.seSök publikationer i DiVA
Ändra sökning
RefereraExporteraLänk till posten
Permanent länk

Direktlänk
Referera
Referensformat
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Annat format
Fler format
Språk
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Annat språk
Fler språk
Utmatningsformat
  • html
  • text
  • asciidoc
  • rtf
Systematic compositional analysis of sputter-deposited boron-containing thin films
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska fakulteten.ORCID-id: 0000-0002-3083-7536
Uppsala University, Sweden.
Uppsala University, Sweden.
Uppsala University, Sweden.
Visa övriga samt affilieringar
2021 (Engelska)Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, E-ISSN 1520-8559, Vol. 39, nr 6, artikel-id 063408Artikel i tidskrift (Refereegranskat) Published
Abstract [en]

Boron-containing materials exhibit a unique combination of ceramic and metallic properties that are sensitively dependent on their given chemical bonding and elemental compositions. However, determining the composition, let alone bonding, with sufficient accuracy is cumbersome with respect to boron, being a light element that bonds in various coordinations. Here, we report on the comprehensive compositional analysis of transition-metal diboride (TMBx) thin films (TM = Ti, Zr, and Hf) by energy-dispersive x-ray spectroscopy (EDX), x-ray photoelectron spectroscopy (XPS), time-of-flight elastic recoil detection analysis (ToF-ERDA), Rutherford backscattering spectrometry (RBS), and nuclear reaction analysis (NRA). The films are grown on Si and C substrates by dc magnetron sputtering from stoichiometric TMB2 targets and have hexagonal AlB2-type columnar structures. EDX considerably overestimates B/TM ratios, x, compared to the other techniques, particularly for ZrBx. The B concentrations obtained by XPS strongly depend on the energy of Ar+ ions used for removing surface oxides and contaminants prior to analyses and are more reliable for 0.5 keV Ar+. ToF-ERDA, RBS, and NRA yield consistent compositions in TiBx. They also prove TiBx and ZrBx films to be homogeneous with comparable B/TM ratios for each film. However, ToF-ERDA, employing a 36-MeV 127I8+ beam, exhibits challenges in depth resolution and quantification of HfBx due to plural and multiple scattering and associated energy loss straggling effects. Compared to ToF-ERDA, RBS (for the film grown on C substrates) and NRA provide more reliable B/Hf ratios. Overall, a combination of methods is recommended for accurately pinpointing the compositions of borides that contain heavy transition metals.

Ort, förlag, år, upplaga, sidor
American Vacuum Society , 2021. Vol. 39, nr 6, artikel-id 063408
Nationell ämneskategori
Materialkemi
Identifikatorer
URN: urn:nbn:se:liu:diva-180132DOI: 10.1116/6.0001234ISI: 000702239400001OAI: oai:DiVA.org:liu-180132DiVA, id: diva2:1601325
Anmärkning

Funding agencies: The SwedishResearch Council VR (Grant Nos. 2021-00357, 2018-03957, and642-2013-8020); the Knut and Alice Wallenberg (KAW) Foundation for project funding (No. KAW 2015.0043), the Swedish Energy Agency under Project No. 51201-1, Carl Tryggers Stiftelse (Contract Nos. CTS 15:219, CTS 20:150, and CTS 14:431); the Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linköping University (Faculty Grant SFO Mat LiU No. 2009 00971), the Swedish Research Council VRRFI (No. 2017-00646_9) for supporting the Accelerator based ion technology center; the Swedish Foundation for StrategicResearch (Contract No. RIF14-0053)

Tillgänglig från: 2021-10-07 Skapad: 2021-10-07 Senast uppdaterad: 2021-12-28Bibliografiskt granskad

Open Access i DiVA

fulltext(3081 kB)432 nedladdningar
Filinformation
Filnamn FULLTEXT01.pdfFilstorlek 3081 kBChecksumma SHA-512
af7e52832679b5a91848feaaeb5294f3cb3db0fdcb6c2dafea5c6da7f9f64f956eeadf041a9c362bc3696b3f0f04c0176a222b3a2daa34941df48afca5c3d62f
Typ fulltextMimetyp application/pdf

Övriga länkar

Förlagets fulltext

Person

Bakhit, BabakRosén, JohannaHultman, LarsPetrov, IvanGreczynski, Grzegorz

Sök vidare i DiVA

Av författaren/redaktören
Bakhit, BabakRosén, JohannaHultman, LarsPetrov, IvanGreczynski, Grzegorz
Av organisationen
TunnfilmsfysikTekniska fakulteten
I samma tidskrift
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films
Materialkemi

Sök vidare utanför DiVA

GoogleGoogle Scholar
Totalt: 432 nedladdningar
Antalet nedladdningar är summan av nedladdningar för alla fulltexter. Det kan inkludera t.ex tidigare versioner som nu inte längre är tillgängliga.

doi
urn-nbn

Altmetricpoäng

doi
urn-nbn
Totalt: 217 träffar
RefereraExporteraLänk till posten
Permanent länk

Direktlänk
Referera
Referensformat
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Annat format
Fler format
Språk
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Annat språk
Fler språk
Utmatningsformat
  • html
  • text
  • asciidoc
  • rtf