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Microstructure, mechanical, and corrosion properties of Zr1-xCrxBy diboride alloy thin films grown by hybrid high power impulse/DC magnetron co-sputtering
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska fakulteten.
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska fakulteten.
Delft Univ Technol, Netherlands.
Delft Univ Technol, Netherlands.
Vise andre og tillknytning
2022 (engelsk)Inngår i: Applied Surface Science, ISSN 0169-4332, E-ISSN 1873-5584, Vol. 591, artikkel-id 153164Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

We study microstructure, mechanical, and corrosion properties of Zr1-xCrxBy coatings deposited by hybrid high power impulse/DC magnetron co-sputtering (CrB2-HiPIMS/ZrB2-DCMS). Cr/(Zr + Cr) ratio, x, increases from 0.13 to 0.9, while B/(Zr + Cr) ratio, y, decreases from 2.92 to 1.81. As reference, ZrB2.18 and CrB1.81 layers are grown at 4000 W DCMS. ZrB2.18 and CrB1.81 columns are continual from near substrate toward the surface with open column boundaries. We find that the critical growth parameter to achieve dense films is the ratio of Cr+- dominated ion flux and the (Zr + B) neutral flux from the ZrB2 target. Thus, the alloys are categorized in two groups: films with x < 0.32 (low Cr+/(Zr + B) ratios) that have continuous columnar growth, rough surfaces, and open column boundaries, and films with x >= 0.32 (high Cr+/(Zr + B) ratios) that Cr+-dominated ion fluxes are sufficient to interrupt continuous columns, resulting in smooth surface and dense fine-grain microstructure. The pulsed metal-ion irradiation is more effective in film densification than continuous Ar+ bombardment. Dense Zr0.46Cr0.54B2.40 and Zr0.10Cr0.90B1.81 alloys are hard (> 30 GPa) and almost stress-free with relative nano indentation toughness of 1.3 MPa root m and 2.3 MPa root m, respectively, and remarkedly low corrosion rates (~& nbsp;1.0 x 10(-6) mA/cm(2) for Zr0.46Cr0.54B2.40 and~& nbsp; 2.1 x 10(-6) mA/cm(2) for Zr0.10Cr0.90B1.81).

sted, utgiver, år, opplag, sider
Elsevier , 2022. Vol. 591, artikkel-id 153164
Emneord [en]
Thin films; Zirconium diborides; Diboride alloys; Microstructure; Mechanical properties; Corrosion protection
HSV kategori
Identifikatorer
URN: urn:nbn:se:liu:diva-185238DOI: 10.1016/j.apsusc.2022.153164ISI: 000790019300002OAI: oai:DiVA.org:liu-185238DiVA, id: diva2:1660075
Merknad

Funding Agencies|Swedish Research Council VR [2018-03957, 2019-00191, 2021-00357]; Swedish Energy Agency [51201-1]; Swedish for Strategic Research (SSF); Swedish National Graduate School in Neutron Scattering (SwedNess); Swedish Government Strategic Research Area in Materials Science on Advanced Functional Materials (AFM) at Linkoping University (Faculty Grant SFO Mat LiU)

Tilgjengelig fra: 2022-05-23 Laget: 2022-05-23 Sist oppdatert: 2022-06-14

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