liu.seSearch for publications in DiVA
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Energy-efficient physical vapor deposition of dense and hard Ti-Al-W-N coatings deposited under industrial conditions
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0001-9237-6512
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering. Univ Illinois, IL 61801 USA; Natl Taiwan Univ Sci & Technol, Taiwan.ORCID iD: 0000-0002-2955-4897
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0002-3083-7536
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
Show others and affiliations
2023 (English)In: Materials & design, ISSN 0264-1275, E-ISSN 1873-4197, Vol. 227, article id 111753Article in journal (Refereed) Published
Abstract [en]

Decreasing the growth temperature to lower energy consumption and enable deposition on temperature-sensitive substrates during thin film growth by magnetron sputtering is crucial for sustainable develop-ment. High-mass metal ion irradiation of the growing film surface with ion energy controlled by metal-ion-synchronized biasing, allows to replace conventionally-used resistive heating, as was recently demonstrated in experiments involving a hybrid high-power impulse and dc magnetron co-sputtering (HiPIMS/DCMS) setup and stationary substrates. Here, we report the extension of the method to indus-trial scale conditions. As a model-case towards understanding the role of one-fold substrate rotation on Ti0.50Al0.50N film growth employing W irradiation, we investigate the effect of two parameters: W ion energy (controlled in the range 45 <= EW <= 630 eV by the amplitude of synchronized substrate bias voltage) and W ion dose per deposited metal atom (determined by the target power). We show that the efficient densification of coatings grown without external heating can be achieved by minimizing the thickness of DCMS-deposited Ti0.50Al0.50N layer that is exposed to an W ion flux, or by increasing EW, at a given Ti0.50Al0.50N thickness.(c) 2023 The Author(s). Published by Elsevier Ltd. This is an open access article under the CC BY license (http://creativecommons.org/licenses/by/4.0/).

Place, publisher, year, edition, pages
ELSEVIER SCI LTD , 2023. Vol. 227, article id 111753
Keywords [en]
PVD; Energy-efficient; Industrial; Densification; Ion-irradiation
National Category
Other Materials Engineering
Identifiers
URN: urn:nbn:se:liu:diva-194501DOI: 10.1016/j.matdes.2023.111753ISI: 000991271100001OAI: oai:DiVA.org:liu-194501DiVA, id: diva2:1766600
Note

Funding Agencies|Swedish Research Council VR [2018-03957]; Swedish Energy Agency [51201-1]; Knut and Alice Wallenberg Foundation [KAW2016.0358, KAW2019.0290]; Carl Tryggers Stiftelse [CTS 20:150]; Swedish Research Council (VR) [2019-00191, 2021-00357]

Available from: 2023-06-13 Created: 2023-06-13 Last updated: 2023-10-26

Open Access in DiVA

fulltext(8620 kB)48 downloads
File information
File name FULLTEXT01.pdfFile size 8620 kBChecksum SHA-512
e65d5e9f0e9cc9a5fc76f8bf9a39b3a4e96950dc33a0f13d98bdf35b3ea443aee6f39ddd36f82535d7b300af10df2566b66cfb5bf360b512ff95789ff70a92b4
Type fulltextMimetype application/pdf

Other links

Publisher's full text

Search in DiVA

By author/editor
Pshyk, OleksandrPetrov, IvanBakhit, BabakLu, JunHultman, LarsGreczynski, Grzegorz
By organisation
Thin Film PhysicsFaculty of Science & Engineering
In the same journal
Materials & design
Other Materials Engineering

Search outside of DiVA

GoogleGoogle Scholar
Total: 48 downloads
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 83 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf