liu.seSearch for publications in DiVA
Endre søk
RefereraExporteraLink to record
Permanent link

Direct link
Referera
Referensformat
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Annet format
Fler format
Språk
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Annet språk
Fler språk
Utmatningsformat
  • html
  • text
  • asciidoc
  • rtf
High-mass metal ion irradiation enables growth of high-entropy sublattice nitride thin films from elemental targets
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska fakulteten. Sumy State Univ, Ukraine. (Wallenberg Initiative Materials Science for Sustainability)ORCID-id: 0000-0003-3162-2972
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska fakulteten. Empa Swiss Fed Labs Mat Sci & Technol, Switzerland.ORCID-id: 0000-0001-9237-6512
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska fakulteten. Warsaw Univ Technol, Poland.ORCID-id: 0000-0001-7104-3196
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska fakulteten.ORCID-id: 0000-0003-3203-7935
Vise andre og tillknytning
2023 (engelsk)Inngår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, E-ISSN 1520-8559, Vol. 41, nr 6, artikkel-id 063108Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

Synthesis of high-entropy sublattice nitride (HESN) coatings by magnetron sputtering is typically done using custom-made alloyed targets with specific elemental compositions. This approach is expensive, requires long delivery times, and offers very limited flexibility to adjust the film composition. Here, we demonstrate a new method to grow HESN films, which relies on elemental targets arranged in the multicathode configuration with substrates rotating during deposition. TiVNbMoWN films are grown at a temperature of similar to 520(degrees)C using Ti, V, Nb, and Mo targets operating in the direct current magnetron sputtering mode, while the W target, operated by high power impulse magnetron sputtering (HiPIMS), provides a source of heavy ions. The energy of the metal ions EW+ is controlled in the range from 80 to 620 eV by varying the amplitude of the substrate bias pulses V-s, synchronized with the metal-ion-rich phase of HiPIMS pulses. We demonstrate that W(+ )irradiation provides dynamic recoil mixing of the film-forming components in the near-surface atomic layers. For EW+ >= 320 eV the multilayer formation phenomena, inherent for this deposition geometry, are suppressed and, hence, compositionally uniform HESN films are obtained, as confirmed by the microstructural and elemental analysis.(c) 2023 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license(http://creativecommons.org/licenses/by/4.0/)

sted, utgiver, år, opplag, sider
A V S AMER INST PHYSICS , 2023. Vol. 41, nr 6, artikkel-id 063108
HSV kategori
Identifikatorer
URN: urn:nbn:se:liu:diva-198948DOI: 10.1116/6.0003065ISI: 001084540600001OAI: oai:DiVA.org:liu-198948DiVA, id: diva2:1809822
Merknad

Funding Agencies|SSF; Swedish Research Council VR; Swedish Energy Agency; aforsk Foundation [UKR22-0031]; Knut and Alice Wallenberg (KAW) Foundation [2018-03957]; Swedish Research Council VR-RFI [51201-51201]; Wallenberg Initiative Materials Science for Sustainability (WISE) - Knut and Alice Wallenberg Foundation [22-4]; Knut and Alice Wallenberg Foundation [CTS 20:150]; Swedish National Infrastructure in Advanced Electron Microscopy [2019_00191]; Polish National Agency for Academic Exchange; [2021-00171]; [RIF21-0026]; [BPN/BEK/2021/1/00366/U/00001]

Tilgjengelig fra: 2023-11-06 Laget: 2023-11-06 Sist oppdatert: 2024-05-01

Open Access i DiVA

fulltext(3844 kB)10 nedlastinger
Filinformasjon
Fil FULLTEXT01.pdfFilstørrelse 3844 kBChecksum SHA-512
c7a5e3408cbc4144cc4f9ccabe0f544cd299bc379c4d77d1d38d9c7360e2e1da86b20482d4aad60e7ac791f6ec82577f8109e8aa3c86ee0a03bc4b5077341b36
Type fulltextMimetype application/pdf

Andre lenker

Forlagets fulltekst

Person

Pshyk, Oleksandr V.

Søk i DiVA

Av forfatter/redaktør
Rogoz, VladyslavPshyk, Oleksandr V.Wicher, BartoszPalisaitis, JustinasLu, JunPetrov, IvanHultman, LarsGreczynski, Grzegorz
Av organisasjonen
I samme tidsskrift
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films

Søk utenfor DiVA

GoogleGoogle Scholar
Totalt: 10 nedlastinger
Antall nedlastinger er summen av alle nedlastinger av alle fulltekster. Det kan for eksempel være tidligere versjoner som er ikke lenger tilgjengelige

doi
urn-nbn

Altmetric

doi
urn-nbn
Totalt: 69 treff
RefereraExporteraLink to record
Permanent link

Direct link
Referera
Referensformat
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Annet format
Fler format
Språk
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Annet språk
Fler språk
Utmatningsformat
  • html
  • text
  • asciidoc
  • rtf