Materials science domain is facing the fourth paradigm of science, i.e., data-driven science, which also encompasses the first three paradigms based on theory, experiment, and simulation. The semiconductor domain is one of many sub-domains of materials science, involving both mathematical models-based simulations and conventional experiments to study materials. A significant challenge in the semicon- ductor domain is the lack of interoperability between materials simulation data and experimental data. While there is existing work, such as the Materials Design Ontology, that enhances the interoperability of simulation data, there remains a need for representing experimental data with rich semantics. To improve the findability, accessibility, interoperability, and reusability of semiconductor experimental data, we present the initial steps in developing a semiconductor domain ontology, SemicONTO.