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Structure and properties of phosphorus-carbide thin solid films
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska högskolan.
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska högskolan.ORCID-id: 0000-0001-9402-1491
Research Institute for Technical Physics and Materials Science, P.O. Box 49, Budapest, H-1525, Hungary.
Linköpings universitet, Institutionen för fysik, kemi och biologi, Halvledarmaterial. Linköpings universitet, Tekniska högskolan.
Vise andre og tillknytning
2013 (engelsk)Inngår i: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 548, nr 2, s. 247-254Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

Phosphorus-carbide (CPx) thin films have been deposited by unbalanced reactive magnetron sputtering and investigated by TEM, XPS, SEM, ERDA, Raman scattering spectroscopy, nanoindentation testing, and four-point electrical probe techniques. As-deposited films with x=0.1 are electron amorphous with elements of FL structure and high mechanical resiliency with hardness of 34.4 GPa and elastic recovery of 72%. The electrical resistivity of the films are in the range 0.4-1.7 Ωcm for CP0.027, 1.4-22.9 Ωcm for CP0.1, and lower than the minimal value the four-point probe is able to detect for CPx with x≥0.2.

sted, utgiver, år, opplag, sider
2013. Vol. 548, nr 2, s. 247-254
Emneord [en]
Phosphorus carbide, thin films, magnetron sputtering
HSV kategori
Identifikatorer
URN: urn:nbn:se:liu:diva-17058DOI: 10.1016/j.tsf.2013.10.010ISI: 000327530300039OAI: oai:DiVA.org:liu-17058DiVA, id: diva2:201489
Tilgjengelig fra: 2009-03-04 Laget: 2009-03-04 Sist oppdatert: 2017-12-13bibliografisk kontrollert
Inngår i avhandling
1. Fullerene-like CNx and CPx Thin Films; Synthesis, Modeling, and Applications
Åpne denne publikasjonen i ny fane eller vindu >>Fullerene-like CNx and CPx Thin Films; Synthesis, Modeling, and Applications
2009 (engelsk)Doktoravhandling, med artikler (Annet vitenskapelig)
Abstract [en]

This Thesis concerns the development of fullerene-like (FL) carbon nitride (CNx) thin films and the discovery of phosphorus-carbide (CPx) compounds. The work dedicated to CPx include first-principles theoretical simulations of the growth and properties of FL-CPx structures. I have employed DC magnetron sputtering methods to synthesize both CNx and CPx thin films. The deposition conditions for CPx films were chosen on the basis of the theoretical results as well as from the experience from the deposition of FL-CNx thin films.

The characterization of the CPx films is divided into three main directions: structural characterization by transmission electron microscopyand scanning electron microscopy, analysis of the amount of elements and chemical bonds presentin the structure by X-ray photoelectron spectroscopy and Auger spectroscopy, and mechanicalproperty analysis by nanoindentation. The CPx films exhibit a short range orderedstructure with FL characteristics for substrate temperature of 300 °C and for a phosphorus content of 10-15 at.%, which isconsistent with the theoretical findings. These films also displayed the best mechanical properties in terms of hardness and resiliency, which are better than those of the corresponding FL-CNx films.

For the FL-CNx thin film material, I find that the surface water adsorption is lower compared to commercial computer hard disk top coatings. Following that line the dangling bonds in FL-CNx coatings have been investigated  by electron spin resonance (ESR). The absence of ESR signal for FL-CNx indicates very low density of dangling bonds in the material, which explains the low water adsorption tendency.

The potential for using highly elastic FL-CNx coatings in an automotive valve-train environment has also been investigated. CNx coatings of different nitrogen content were investigated using microscopy, wear testing, nanoindentation testing, and in an experimental cam-tappet testing rig. The FL-CNx coating with the higher value of hardness/elastic modulus showed greater durability in cam-tappet wear testing.

sted, utgiver, år, opplag, sider
Linköping: Linköping University Electronic Press, 2009. s. 60
Serie
Linköping Studies in Science and Technology. Dissertations, ISSN 0345-7524 ; 1247
Emneord
Phosphorus-carbide (CPx), carbon nitride (CNx), thin films, resilient coatings, magnetron sputtering, theoretical modeling
HSV kategori
Identifikatorer
urn:nbn:se:liu:diva-17126 (URN)978-91-7393-676-7 (ISBN)
Disputas
2009-03-30, Planck, Fysikhuset, Campus Valla, Linköpings universitet, Linköping, 10:15 (engelsk)
Opponent
Veileder
Tilgjengelig fra: 2009-03-24 Laget: 2009-03-06 Sist oppdatert: 2016-08-31bibliografisk kontrollert

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