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Monolithic SU-8 microcavities for efficient fluorescence collection
Linköpings universitet, Institutionen för fysik, kemi och biologi. Linköpings universitet, Tekniska högskolan.
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tillämpad Fysik. Linköpings universitet, Tekniska högskolan.
2009 (engelsk)Inngår i: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 19, nr 8, s. 085011-Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

The fabrication of capped microstructures such as channels or cavities typically involves multiple production steps. In this work, we demonstrate a fabrication procedure that enables the generation of capped monolithic microstructures of arbitrary geometry in one single SU-8 exposure step. The presented method also enables the embedment of metal self-aligned surfaces for use as electrodes or mirrors. The devices furthermore demonstrate a capability of increasing fluorescent collection, as measured by an epi-fluorescent inverted microscope, by up to 15-fold.

sted, utgiver, år, opplag, sider
IOP Publishing , 2009. Vol. 19, nr 8, s. 085011-
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URN: urn:nbn:se:liu:diva-19796DOI: 10.1088/0960-1317/19/8/085011OAI: oai:DiVA.org:liu-19796DiVA, id: diva2:229000
Tilgjengelig fra: 2009-08-10 Laget: 2009-08-10 Sist oppdatert: 2017-12-13

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