SiC and III-nitride Growth in a Hot-wall CVD ReactorShow others and affiliations
2005 (English)In: Materials Science Forum, ISSN 0255-5476, volume 483-485, Trans Tech Publications , 2005, Vol. 483-485, p. 61-66Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
Trans Tech Publications , 2005. Vol. 483-485, p. 61-66
National Category
Natural Sciences
Identifiers
URN: urn:nbn:se:liu:diva-30739Local ID: 16353OAI: oai:DiVA.org:liu-30739DiVA, id: diva2:251562
Conference
ECSCRM2004
2009-10-092009-10-092024-03-01