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The Ion Energy Distributions in a High Power Impulse Magnetron Plasma
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .
Sheffield Hallam University.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .
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2005 (English)In: 48th Annual Technical Conference of the Society of Vacuum Coaters,2005, 2005, p. 470-473Conference paper, Published paper (Other academic)
Place, publisher, year, edition, pages
2005. p. 470-473
Keywords [en]
HIPIMS, thin films
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Natural Sciences
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URN: urn:nbn:se:liu:diva-30913Local ID: 16581OAI: oai:DiVA.org:liu-30913DiVA, id: diva2:251736
Available from: 2009-10-09 Created: 2009-10-09 Last updated: 2013-10-30

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Böhlmark, JohanAlami, JonesHelmersson, Ulf

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