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Optimization of off-null ellipsometry in sensor applications
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Applied Optics .ORCID iD: 0000-0001-9229-2028
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology.
2004 (English)Article in journal (Refereed) Published
Abstract [en]

The optimization of azimuth angle settings of a polarizer-compensator-sample-analyzer off-null ellipsometric sensor system to obtain maximum intensity changes with respect to changes in the properties of a sensing layer, with and without considering changes in a reflectance, is studied. Optimal conditions in the two cases are derived analytically under the assumption that linear relationships exist among the changes in the parameters of the sensing layer. The validity of these optimal conditions is verified by numerical examples. The advantage of using ellipsometry compared with reflectometry to readout sensing information for some sensing samples is also discussed. © 2004 Optical Society of America.

Place, publisher, year, edition, pages
2004. Vol. 43, no 10, p. 2000-2005
National Category
Natural Sciences
Identifiers
URN: urn:nbn:se:liu:diva-41352DOI: 10.1364/AO.43.002000Local ID: 55653OAI: oai:DiVA.org:liu-41352DiVA, id: diva2:262204
Available from: 2009-10-10 Created: 2009-10-10 Last updated: 2021-09-27
In thesis
1. Gas Sensing Based on Ellipsometric Readout: Methodology and Development
Open this publication in new window or tab >>Gas Sensing Based on Ellipsometric Readout: Methodology and Development
2003 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

The concept of an ellipsometric sensor array system - "an optical nose" - is presented. The system is used to monitor and discriminate gases. The optical readout is based on polarizer-compensator-sample-analyzer (PCSA) off-null ellipsometry. Thin porous silicon sensing layers with and without surface chemical modifications are used to measure low concentration methanol, ethanol and 2-propanol gases. The main contents of the thesis are:

- Principle and construction of a prototype PCSA ellipsometric gas sensor system.

- Optimization of the azimuth angle settings of the optical components in PCSA off-null ellipsometry to obtain the maximum readout sensitivity.

- Application of return-path off-null ellipsometry in gas sensing as an alternative way to construct ellipsometric gas sensors.

- Modification of porous silicon sensing layers by copper deposition to obtain different gas sensitivity for the enhancement of selectivity.

- Multi-sensing concept of the optical nose to detect and discriminate alcohols using porous silicon sensing layers and pattern recognition techniques.

So far, a prototype PCSA ellipsometric gas sensor system has been constructed and tested. Low concentration methanol, ethanol and 2-propanol vapors are detected and discriminated based on the PCSA off-null ellipsometric gas sensor system and porous silicon sensing layers.

Place, publisher, year, edition, pages
Linköping: Linköping University, 2003. p. 32
Series
Linköping Studies in Science and Technology. Dissertations, ISSN 0345-7524 ; 826
National Category
Computer Sciences
Identifiers
urn:nbn:se:liu:diva-177914 (URN)9173736597 (ISBN)
Public defence
2003-05-27, Planck, Fysikhuset, Campus Valla, Linköping, 10:15 (English)
Opponent
Note

All or some of the partial works included in the dissertation are not registered in DiVA and therefore not linked in this post.

Available from: 2021-07-07 Created: 2021-07-07 Last updated: 2023-03-01Bibliographically approved

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Wang, GuoliangArwin, HansJansson, Roger

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