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New NO2 sensor based on Au gate field effect devices
Institute of Physical and Theoretical Chemistry, University of Tübingen, Auf der Morgenstelle 8, D-72076 Tübingen, Germany.
Weiß, T., Institute of Physical and Theoretical Chemistry, University of Tübingen, Auf der Morgenstelle 8, D-72076 Tübingen, Germany.
Aragón, R., Laboratorio de Películas Delgadas, Facultad de Ingeniería, Universidad de Buenos Aires and Prinso-Conicet-Citefa, Paseo Colón 850 (1063), Capital Federal, Argentina.
Institute of Physical and Theoretical Chemistry, University of Tübingen, Auf der Morgenstelle 8, D-72076 Tübingen, Germany, Division of Applied Physics, Department of Physics and Measurement Technology, Linkoping University, SE-581 83 Linkoping, Sweden.
2001 (engelsk)Inngår i: Sensors and actuators. B, Chemical, ISSN 0925-4005, E-ISSN 1873-3077, Vol. 78, nr 1-3, s. 195-201Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

A new NO2 field effect gas sensor based on Au gates is demonstrated and the influence of gate morphology on sensor response is evaluated. A sensitization mechanism, for non-catalytic continuous gates, based on grain boundary diffusion is proposed. The sensors are fabricated as MOS (metal-oxide-semiconductor) capacitors with sputtered or thermal evaporated Au gates (at different substrate temperatures) with thickness between 75 and 960 nm. The devices' sensitivity, in the range of 15-200 ppm of NO2 in dry air, depends strongly on gate morphology, shorter response times and larger voltage shifts are correlated with smaller grain sizes. Scanning-electron-microscope (SEM) images show that the microstructure is very stable after 5 months of gas exposure at temperatures up to 200°C. The sensors are selective to NO2 (with NO, H2 and CO as interfering gases) and selectivity depends also on gate structure. © 2001 Elsevier Science B.V. All rights reserved.

sted, utgiver, år, opplag, sider
2001. Vol. 78, nr 1-3, s. 195-201
Emneord [en]
Chemical gas sensor, Field effect, Gold gates, Nitrogen dioxide
HSV kategori
Identifikatorer
URN: urn:nbn:se:liu:diva-47284DOI: 10.1016/S0925-4005(01)00812-7OAI: oai:DiVA.org:liu-47284DiVA, id: diva2:268180
Tilgjengelig fra: 2009-10-11 Laget: 2009-10-11 Sist oppdatert: 2017-12-13

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