liu.seSearch for publications in DiVA
Endre søk
RefereraExporteraLink to record
Permanent link

Direct link
Referera
Referensformat
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Annet format
Fler format
Språk
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Annet språk
Fler språk
Utmatningsformat
  • html
  • text
  • asciidoc
  • rtf
Is ellipsometry suitable for sensor applications?
Linköpings universitet, Tekniska högskolan. Linköpings universitet, Institutionen för fysik, kemi och biologi, Tillämpad optik.ORCID-id: 0000-0001-9229-2028
2001 (engelsk)Inngår i: Sensors and Actuators A-Physical, ISSN 0924-4247, E-ISSN 1873-3069, Vol. 92, nr 1-3, s. 43-51Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

Ellipsometry is a powerful tool for optical characterization of surfaces and thin-films. Very favorable features for sensor applications are the in situ advantage, the possibility to work with non-labeled molecules and the high thickness resolution. Sub-nanometers resolution can be achieved in bioaffinity-based sensing and ppm-sensitivity in gas sensing. Ellipsometric sensor systems are based on monitoring changes in the thickness, the refractive index or the microstructure of a sensing layer. These changes are induced by the substance or process measured. A classification of sensing layers is proposed and discussed. One specific application, gas sensing based on sensor arrays, is discussed in some detail. However, the main objective is to critically discuss the possibilities for sensor applications based on ellipsometric read-out.

sted, utgiver, år, opplag, sider
2001. Vol. 92, nr 1-3, s. 43-51
Emneord [en]
Affinity biosensors, Capillary condensation, Ellipsometry, Gas sensors
HSV kategori
Identifikatorer
URN: urn:nbn:se:liu:diva-47305DOI: 10.1016/S0924-4247(01)00538-6OAI: oai:DiVA.org:liu-47305DiVA, id: diva2:268201
Tilgjengelig fra: 2009-10-11 Laget: 2009-10-11 Sist oppdatert: 2017-12-13

Open Access i DiVA

Fulltekst mangler i DiVA

Andre lenker

Forlagets fulltekst

Personposter BETA

Arwin, Hans

Søk i DiVA

Av forfatter/redaktør
Arwin, Hans
Av organisasjonen
I samme tidsskrift
Sensors and Actuators A-Physical

Søk utenfor DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric

doi
urn-nbn
Totalt: 203 treff
RefereraExporteraLink to record
Permanent link

Direct link
Referera
Referensformat
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Annet format
Fler format
Språk
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Annet språk
Fler språk
Utmatningsformat
  • html
  • text
  • asciidoc
  • rtf