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MISiCFET chemical gas sensors for high temperature and corrosive environment applications
Linköpings universitet, Tekniska högskolan. Linköpings universitet, Institutionen för fysik, kemi och biologi, Tillämpad Fysik.ORCID-id: 0000-0002-2817-3574
Linköpings universitet, Tekniska högskolan. Linköpings universitet, Institutionen för fysik, kemi och biologi, Tillämpad Fysik.
SSENCE, SE-58183 Linkoping, Sweden Linkoping Univ, Div Appl Phys, SE-58183 Linkoping, Sweden Ford Motor Co, Dearborn, MI 48124 USA Vattenfall Dev, SE-81426 Alvkarleby, Sweden AppliedSensor AB, SE-58330 Linkoping, Sweden Volvo PV AB, SE-40508 Gothenburg, Sweden ACREO Ab, SE-16440 Kista, Sweden Volvo TU, SE-41288 Gothenburg, Sweden.
Linköpings universitet, Tekniska högskolan. Linköpings universitet, Institutionen för fysik, kemi och biologi, Tillämpad Fysik.
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2002 (engelsk)Inngår i: Materials Science Forum, ISSN 0255-5476, E-ISSN 1662-9752, Vol. 389-3, s. 1415-1418Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

A chemical gas sensor based on a silicon carbide field effect transistor with a catalytic gate metal has been under development for a number of years. The buried gate design allows the sensor to operate at high temperatures, routinely up to 600degreesC and for at least three days at 700degreesC. The chemical inertness of silicon carbide makes it a suitable sensor technology for applications in corrosive environments such as exhaust gases and flue gases from boilers. The selectivity of the sensor devices is established through the choice of type and structure of the gate metal as well as the operation temperature. In this way NH3 sensors with low cross sensitivity to NOx have been demonstrated as potential sensors for control of selective catalytic reduction (SCR) of NOx by urea injection into diesel exhausts. The hardness of the silicon carbide makes it for example more resistant to water splash at cold start of a petrol engine than existing technologies, and a sensor which can control the air to fuel ratio, before the exhaust gases are heated, has been demonstrated. Silicon carbide sensors are also tested in flue gases from boilers. Efficient regulation of the combustion in a boiler will decrease fuel consumption and reduce emissions.

sted, utgiver, år, opplag, sider
2002. Vol. 389-3, s. 1415-1418
Emneord [en]
ammonia, catalytic metal, combustion, FETs, flue gases, gas sensors, high temperature, SCR
HSV kategori
Identifikatorer
URN: urn:nbn:se:liu:diva-48830OAI: oai:DiVA.org:liu-48830DiVA, id: diva2:269726
Tilgjengelig fra: 2009-10-11 Laget: 2009-10-11 Sist oppdatert: 2017-12-12

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Lloyd-Spets, AnitaUnéus, LarsWingbrant, HelenaEkedahl, Lars-GunnarLundström, Ingemar

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