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On the change of preferential growth orientation in chemical vapor deposition of titanium carbide by aromatic hydrocarbon precursors
Linköpings universitet, Institutionen för fysik, kemi och biologi, Halvledarmaterial. Linköpings universitet, Tekniska högskolan.ORCID-id: 0000-0002-7171-5383
Linköpings universitet, Institutionen för fysik, kemi och biologi. Linköpings universitet, Tekniska högskolan.
Linköpings universitet, Institutionen för fysik, kemi och biologi, Kemi. Linköpings universitet, Tekniska fakulteten.ORCID-id: 0000-0002-5341-2637
2013 (engelsk)Inngår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, E-ISSN 1520-8559, Vol. 31, nr 2Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

Thin films of titanium carbide grown by chemical vapor deposition exhibit a strong preferential (111) growth direction if aromatic hydrocarbons, such as benzene, are used as a carbon precursor. If aliphatic hydrocarbons such as methane are used, growth on the (100) surface is preferred. In this study, quantum chemical computations are used to study the adsorption of benzene and methane on the (100) and (111) surfaces to provide an explanation for the changed growth behavior. The adsorption energy of benzene is found to be approximately twice as high on the (111) surface as compared to the (100) surface, and adsorption studies further suggest that benzene chemisorbs on the (111) surface, while it physisorbs on the (100) surface. The studies reveal no significant differences in adsorption energy or behavior for methane on the two surfaces. The authors propose that the higher benzene adsorption energy and different adsorption behavior on the (111) surface are the explanations for the preferential growth orientation.

sted, utgiver, år, opplag, sider
American Vacuum Society , 2013. Vol. 31, nr 2
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Identifikatorer
URN: urn:nbn:se:liu:diva-90672DOI: 10.1116/1.4792723ISI: 000315595700024OAI: oai:DiVA.org:liu-90672DiVA, id: diva2:614197
Merknad

Funding Agencies|Swedish Research Council (VR)||

Tilgjengelig fra: 2013-04-04 Laget: 2013-04-03 Sist oppdatert: 2017-12-06bibliografisk kontrollert

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Pedersen, HenrikOjamäe, Lars

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