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Measurements of the optical constants of scandium in the 50-1300 eV range
Lawrence Berkeley National Laboratory, USA.
Lawrence Berkeley National Laboratory, USA.
Lawrence Berkeley National Laboratory, USA.
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska högskolan.
Vise andre og tillknytning
2004 (engelsk)Inngår i: SPIE 5538, Optical Constants of Materials for UV to X-Ray Wavelengths / [ed] Regina Soufli, John F. Seely, SPIE - International Society for Optical Engineering, 2004, s. 64-71Konferansepaper, Publicerat paper (Fagfellevurdert)
Abstract [en]

Scandium containing multilayers have been produced with very high reflectivity in the soft x-ray spectrum.  Accurate optical constants are required in order to model the multilayer reflectivity.  Since there are relatively few measurements of the optical constants of Scandium in the soft x-ray region we have performed measurements over the energy range of 50-1,300 eV.  Thin films of Scandium were deposited by ion-assisted magnetron sputtering at Linkoping University and DC Magnetron sputtering at CXRO.  Transmission measurements were performed at the Advanced Light Source beamline 6.3.2.  The absorption coefficient was deduced from the measurements and the dispersive part of the index of refraction was obtained using the Kramers-Kronig relation.  The measured optical constants are used to model the near-normal incidence reflectivity of Cr/Sc multilayers near the Sc L2,3 edge.

sted, utgiver, år, opplag, sider
SPIE - International Society for Optical Engineering, 2004. s. 64-71
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Identifikatorer
URN: urn:nbn:se:liu:diva-94691DOI: 10.1117/12.563615OAI: oai:DiVA.org:liu-94691DiVA, id: diva2:634426
Konferanse
SPIE 5538, Denver, CO, USA, August 02, 2004
Tilgjengelig fra: 2013-07-01 Laget: 2013-07-01 Sist oppdatert: 2013-08-05bibliografisk kontrollert

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