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A review of metal-ion-flux-controlled growth of metastable TiAlN by HIPIMS/DCMS co-sputtering
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska högskolan.ORCID-id: 0000-0002-4898-5115
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska högskolan.
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska högskolan.
CemeCon AG, Germany.
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2014 (Engelska)Ingår i: Surface & Coatings Technology, ISSN 0257-8972, E-ISSN 1879-3347, Vol. 257, s. 15-25Artikel i tidskrift (Refereegranskat) Published
Abstract [en]

We review results on the growth of metastable Ti1-xAlxN alloy films by hybrid high-power pulsed and dc magnetron co-sputtering (HIPIMS/DCMS) using the time domain to apply substrate bias either in synchronous with the entire HIPIMS pulse or just the metal-rich portion of the pulse in mixed Ar/N-2 discharges. Depending upon which elemental target, Ti or Al, is powered by HIPIMS, distinctly different film-growth kinetic pathways are observed due to charge and mass differences in the metal-ion fluxes incident at the growth surface. Al+ ion irradiation during Al-HIPIMS/Ti-DCMS at 500 degrees C, with a negative substrate bias V-s = 60 V synchronized to the HIPIMS pulse (thus suppressing Ar+ ion irradiation due to DCMS), leads to single-phase NaCl-structure Ti1-xAlxN films (x less than= 0.60) with high hardness (greater than30 GPa with x greater than 0.55) and low stress (0.2-0.8 GPa compressive). Ar+ ion bombardment can be further suppressed in favor of predominantly Al+ ion irradiation by synchronizing the substrate bias to only the metal-ion-rich portion of the Al-HIPIMS pulse. In distinct contrast Ti-HIPIMS/Al-DCMSTi1-xAlxN layers grown with Ti+/Ti2+ metal ion irradiation and the same HIPIMS-synchronized V-s value, are two-phase mixtures, NaCl-structure Ti1-xAlxN plus wurtzite AlN, exhibiting low hardness (similar or equal to 18 GPa) with high compressive stresses, up to -3.5 GPa. In both cases, film properties are controlled by the average metal-ion momentum per deposited atom less thanp(d)greater than transferred to the film surface. During Ti-HIPIMS, the growing film is subjected to an intense flux of doubly-ionized Ti2+, while Al2+ irradiation is insignificant during Al-HIPIMS. This asymmetry is decisive since the critical less thanp(d)greater than limit for precipitation of w-AlN, 135 [eV-amu](1/2), is easily exceeded during Ti-HIPIMS, even with no intentional bias. The high Ti2+ ion flux is primarily due to the second ionization potential (IP2) of Ti being lower than the first IP (IP1) of Ar. New results involving the HIPIMS growth of metastable Ti1-xAlxN alloy films from segmented TiAl targets are consistent with the above conclusions.

Ort, förlag, år, upplaga, sidor
Elsevier , 2014. Vol. 257, s. 15-25
Nyckelord [en]
HIPIMS; HPPMS; TiAlN; Ionized PVD
Nationell ämneskategori
Fysik
Identifikatorer
URN: urn:nbn:se:liu:diva-112638DOI: 10.1016/j.surfcoat.2014.01.055ISI: 000344423100003OAI: oai:DiVA.org:liu-112638DiVA, id: diva2:769357
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Funding Agencies|European Research Council (ERC) through an Advanced Grant; VINN Excellence Center Functional Nanoscale Materials (FunMat)

Tillgänglig från: 2014-12-08 Skapad: 2014-12-05 Senast uppdaterad: 2017-12-05

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Greczynski, GrzegorzLu, JunJensen, JensGreene, Joseph EHultman, Lars

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