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Effect of cathode composition and nitrogen pressure on macroparticle generation and type of arc discharge in a DC arc source with Ti-Al compound cathodes
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska fakulteten.
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska fakulteten.
Linköpings universitet, Institutionen för datavetenskap, ESLAB - Laboratoriet för inbyggda system. Linköpings universitet, Tekniska högskolan.
2015 (engelsk)Inngår i: Surface & Coatings Technology, ISSN 0257-8972, E-ISSN 1879-3347, Vol. 281, s. 20-26Artikkel i tidsskrift (Fagfellevurdert) Published
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Abstract [en]

Thin films deposited with unfiltered DC arc plasma from Ti, Ti0.75Al0.25, Ti0.50Al0.50, Ti0.30Al0.70, and Al cathodes were characterized with a scanning electron microscope for quantification of extent of macroparticle incorporation. Depositions were performed in N-2 atmosphere in the pressure range from 10(-6) Torr up to 3 . 10(-2) Torr, and the formation of cathode surface nitride contamination was identified from X-ray diffraction analysis. Visual observation and photographic fixation of the arc spot behavior was simultaneously performed. A reduction in macroparticle generation with decreasing Al content and increasing N-2 pressure was demonstrated. A correlated transformation of the arc from type 2 to the type 1 was visually detected and found to be a function of N-2 pressure and at of Al in the cathode. For the Ti cathode, no arc transformation was detected. These observations can be explained by a comparatively high electrical resistivity and high melting point of Al rich surface nitrides, promoting an arc transformation and a reduction in macropartide generation. (C) 2015 Elsevier B.V. All rights reserved.

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ELSEVIER SCIENCE SA , 2015. Vol. 281, s. 20-26
Emneord [en]
Cathodic arc; Type 1; Compound cathode; Macroparticles; Arc transformation; Cathode poisoning
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URN: urn:nbn:se:liu:diva-123803DOI: 10.1016/j.surfcoat.2015.09.030ISI: 000366072200003OAI: oai:DiVA.org:liu-123803DiVA, id: diva2:892917
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Funding Agencies|European Research Council under the European Communitys Seventh Framework Program (FP7)/ERC [258509]; Swedish Research Council (VR) [642-2013-8020]; KAW Fellowship Program

Tilgjengelig fra: 2016-01-11 Laget: 2016-01-11 Sist oppdatert: 2018-01-10

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