liu.seSearch for publications in DiVA
Endre søk
RefereraExporteraLink to record
Permanent link

Direct link
Referera
Referensformat
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Annet format
Fler format
Språk
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Annet språk
Fler språk
Utmatningsformat
  • html
  • text
  • asciidoc
  • rtf
Effect of cathode composition and nitrogen pressure on macroparticle generation and type of arc discharge in a DC arc source with Ti-Al compound cathodes
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska fakulteten.
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tunnfilmsfysik. Linköpings universitet, Tekniska fakulteten.
Linköpings universitet, Institutionen för datavetenskap, ESLAB - Laboratoriet för inbyggda system. Linköpings universitet, Tekniska högskolan.
2015 (engelsk)Inngår i: Surface & Coatings Technology, ISSN 0257-8972, E-ISSN 1879-3347, Vol. 281, s. 20-26Artikkel i tidsskrift (Fagfellevurdert) Published
Resurstyp
Text
Abstract [en]

Thin films deposited with unfiltered DC arc plasma from Ti, Ti0.75Al0.25, Ti0.50Al0.50, Ti0.30Al0.70, and Al cathodes were characterized with a scanning electron microscope for quantification of extent of macroparticle incorporation. Depositions were performed in N-2 atmosphere in the pressure range from 10(-6) Torr up to 3 . 10(-2) Torr, and the formation of cathode surface nitride contamination was identified from X-ray diffraction analysis. Visual observation and photographic fixation of the arc spot behavior was simultaneously performed. A reduction in macroparticle generation with decreasing Al content and increasing N-2 pressure was demonstrated. A correlated transformation of the arc from type 2 to the type 1 was visually detected and found to be a function of N-2 pressure and at of Al in the cathode. For the Ti cathode, no arc transformation was detected. These observations can be explained by a comparatively high electrical resistivity and high melting point of Al rich surface nitrides, promoting an arc transformation and a reduction in macropartide generation. (C) 2015 Elsevier B.V. All rights reserved.

sted, utgiver, år, opplag, sider
ELSEVIER SCIENCE SA , 2015. Vol. 281, s. 20-26
Emneord [en]
Cathodic arc; Type 1; Compound cathode; Macroparticles; Arc transformation; Cathode poisoning
HSV kategori
Identifikatorer
URN: urn:nbn:se:liu:diva-123803DOI: 10.1016/j.surfcoat.2015.09.030ISI: 000366072200003OAI: oai:DiVA.org:liu-123803DiVA, id: diva2:892917
Merknad

Funding Agencies|European Research Council under the European Communitys Seventh Framework Program (FP7)/ERC [258509]; Swedish Research Council (VR) [642-2013-8020]; KAW Fellowship Program

Tilgjengelig fra: 2016-01-11 Laget: 2016-01-11 Sist oppdatert: 2018-01-10

Open Access i DiVA

Fulltekst mangler i DiVA

Andre lenker

Forlagets fulltekst

Personposter BETA

Zhirkov, IgorPetruhins, AndrejsRosén, Jakob

Søk i DiVA

Av forfatter/redaktør
Zhirkov, IgorPetruhins, AndrejsRosén, Jakob
Av organisasjonen
I samme tidsskrift
Surface & Coatings Technology

Søk utenfor DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric

doi
urn-nbn
Totalt: 234 treff
RefereraExporteraLink to record
Permanent link

Direct link
Referera
Referensformat
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Annet format
Fler format
Språk
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Annet språk
Fler språk
Utmatningsformat
  • html
  • text
  • asciidoc
  • rtf