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Exploring the gas sensing performance of catalytic metal/ metal oxide 4H-SiC field effect transistors
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tillämpad sensorvetenskap. Linköpings universitet, Tekniska fakulteten.
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tillämpad sensorvetenskap. Linköpings universitet, Tekniska fakulteten.
Linköpings universitet, Institutionen för fysik, kemi och biologi, Tillämpad sensorvetenskap. Linköpings universitet, Tekniska fakulteten. Microelectronics and Material Physics Laboratories, University of Oulu, Finland.
Microelectronics and Material Physics Laboratories, University of Oulu, Finland.
Vise andre og tillknytning
2016 (engelsk)Inngår i: Materials Science Forum, ISSN 0255-5476, E-ISSN 1662-9752, Vol. 858, s. 997-1000Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

Gas sensitive metal/metal-oxide field effect transistors based on silicon carbide were used to study the sensor response to benzene (C6H6) at the low parts per billion (ppb) concentration range. A combination of iridium and tungsten trioxide was used to develop the sensing layer. Highsensitivity to 10 ppb C6H6 was demonstrated during several repeated measurements at a constant temperature from 180 to 300 °C. The sensor performance was studied also as a function of the electrical operating point of the device, i.e., linear, onset of saturation, and saturation mode. Measurements performed in saturation mode gave a sensor response up to 52 % higher than those performed in linear mode.

sted, utgiver, år, opplag, sider
Trans Tech Publications Inc., 2016. Vol. 858, s. 997-1000
Emneord [en]
Field Effect Transistor, Gas Sensor, Iridium/Tungsten Trioxide, Benzene, 4H-SiC
HSV kategori
Identifikatorer
URN: urn:nbn:se:liu:diva-124153DOI: 10.4028/www.scientific.net/MSF.858.997OAI: oai:DiVA.org:liu-124153DiVA, id: diva2:895918
Konferanse
16th International Conference on Silicon Carbide and Related Materials, Giardini Naxos, Italy, October 4 - 9, 2015
Prosjekter
SENSIndoor, www.sensindoor.eu
Forskningsfinansiär
EU, FP7, Seventh Framework Programme, 604311Tilgjengelig fra: 2016-01-20 Laget: 2016-01-20 Sist oppdatert: 2020-02-17

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