Novel transparent Mg-Si-O-N thin films with high hardness and refractive index
2016 (English)In: Vacuum, ISSN 0042-207X, E-ISSN 1879-2715, Vol. 131Article in journal (Refereed) Published
There is an increasing demand for glass materials with better mechanical and optical properties for display and electronic applications. This paper describes the deposition of novel thin films of Mg-circle divide-Si-O-N onto float glass substrates. Amorphous thin films in the Mg-Si-O-N system with high nitrogen and magnesium contents were deposited by reactive RF magnetron co-sputtering from Mg and Si targets in Ar/N-2/O-2 gas mixtures. The thin films studied span an unprecedented range of compositions up to 45 at% Mg and 80 at% N out of cations and anions respectively. Thin films in the Mg-Si-O-N system were found to be homogeneous and transparent in the visible region. Mechanical properties like hardness (H) and reduced elastic modulus (Er) show high values, up to 21 GPa and 166 GPa respectively. The refractive index (1.87-2.00) increases with increasing magnesium and nitrogen contents. (C) 2016 Elsevier Ltd. All rights reserved.
Place, publisher, year, edition, pages
PERGAMON-ELSEVIER SCIENCE LTD , 2016. Vol. 131
Oxynitride thin films; Magnetron sputtering; High nitrogen content; Hardness; Refractive index
IdentifiersURN: urn:nbn:se:liu:diva-131901DOI: 10.1016/j.vacuum.2016.05.023ISI: 000381541400001OAI: oai:DiVA.org:liu-131901DiVA: diva2:1034872
Funding Agencies|AForsk foundation [14- 457]; European Research Council under the European Communitys Seventh Framework Programme (FP)/ERC grant ; Swedish Foundation for Strategic Research (SSF) through the Future Research Leaders 5 Program; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University Faculty Grant SFO Mat LiU [2009 00971]2016-10-132016-10-112016-10-13