liu.seSearch for publications in DiVA
Change search
ReferencesLink to record
Permanent link

Direct link
Influence of pulse frequency and bias on microstructure and mechanical properties of TiB2 coatings deposited by high power impulse magnetron sputtering
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0003-3203-7935
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0001-9140-6724
Show others and affiliations
2016 (English)In: Surface & Coatings Technology, ISSN 0257-8972, E-ISSN 1879-3347, Vol. 304, 203-210 p.Article in journal (Refereed) Published
Abstract [en]

The high plasma density and large fraction of ionized species created in a high power impulse magnetron sputtering (HiPIMS) discharge add new measures to control the sputtering process. We have studied the sputtering of TiB2 coatings by HiPIMS from a compound target in an industrial system. How the degree of ionized species effects coating microstructure and mechanical properties has been investigated by varying the pulse frequency between 200 Hz and 1000 Hz while keeping the average power constant at 2 kW. The coatings have a B/Ti atomic ratio amp;gt;= 2.5 and a microstructure exhibiting 001 textured nanocolumnar grains with an amorphous B tissue phase in grain boundaries. Lower frequencies provide higher degree of ionization, which does, however, increase the compressive residual stress in the coatings. This results in harder coatings and the highest hardness of 49 GPa is measured for the coating deposited at 200 Hz (-3.8 GPa residual stress). A change in texture from random orientation to 001 texture is achieved when going from regular dc sputtering to HiPIMS at a floating bias. Superhard (H = 43 GPa) TiB2 coatings with a relatively low compressive stress of about -1 GPa can be deposited by HiPIMS at 1000 Hz using floating bias. (C) 2016 Elsevier B.V. All rights reserved.

Place, publisher, year, edition, pages
ELSEVIER SCIENCE SA , 2016. Vol. 304, 203-210 p.
Keyword [en]
Titanium diboride; Hipims Residual stress; Texture; Mechanical properties; Superhardness
National Category
Manufacturing, Surface and Joining Technology
Identifiers
URN: urn:nbn:se:liu:diva-132332DOI: 10.1016/j.surfcoat.2016.06.086ISI: 000384775900025OAI: oai:DiVA.org:liu-132332DiVA: diva2:1046210
Note

Funding Agencies|Knut and Alice Wallenberg Foundation [2015.0043]; Electron Microscopy laboratory in Linkoping; Swedish Research Council (VR) [642-2013-8020, 622-2008-405, 621-2012-4359]

Available from: 2016-11-12 Created: 2016-11-01 Last updated: 2016-11-12

Open Access in DiVA

No full text

Other links

Publisher's full text

Search in DiVA

By author/editor
Nedfors, NilsMockuté, AurelijaPalisaitis, JustinasPersson, Per O ANäslund, Lars-ÅkeRosén, Johanna
By organisation
Thin Film PhysicsFaculty of Science & EngineeringDepartment of Physics, Chemistry and Biology
In the same journal
Surface & Coatings Technology
Manufacturing, Surface and Joining Technology

Search outside of DiVA

GoogleGoogle Scholar

Altmetric score

Total: 16 hits
ReferencesLink to record
Permanent link

Direct link