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Low temperature co-fired ceramic packaging of CMOS capacitive sensor chip towards cell viability monitoring
University of Oulu, Finland.
University of Oulu, Finland.
University of Oulu, Finland.
University of Maryland, MD 20742 USA.
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2016 (English)In: Beilstein Journal of Nanotechnology, ISSN 2190-4286, Vol. 7, p. 1871-1877Article in journal (Refereed) Published
Abstract [en]

Cell viability monitoring is an important part of biosafety evaluation for the detection of toxic effects on cells caused by nanomaterials, preferably by label-free, noninvasive, fast, and cost effective methods. These requirements can be met by monitoring cell viability with a capacitance-sensing integrated circuit (IC) microchip. The capacitance provides a measurement of the surface attachment of adherent cells as an indication of their health status. However, the moist, warm, and corrosive biological environment requires reliable packaging of the sensor chip. In this work, a second generation of low temperature co-fired ceramic (LTCC) technology was combined with flip-chip bonding to provide a durable package compatible with cell culture. The LTCC-packaged sensor chip was integrated with a printed circuit board, data acquisition device, and measurement-controlling software. The packaged sensor chip functioned well in the presence of cell medium and cells, with output voltages depending on the medium above the capacitors. Moreover, the manufacturing of microfluidic channels in the LTCC package was demonstrated.

Place, publisher, year, edition, pages
BEILSTEIN-INSTITUT , 2016. Vol. 7, p. 1871-1877
Keywords [en]
capacitance sensing; cell viability; lab-on-a-chip; low temperature co-fired ceramic (LTCC)
National Category
Materials Chemistry
Identifiers
URN: urn:nbn:se:liu:diva-133386DOI: 10.3762/bjnano.7.179ISI: 000388896500001OAI: oai:DiVA.org:liu-133386DiVA, id: diva2:1060077
Note

Funding Agencies|Academy of Finland [268944]; TEKES [1427/31/2010]

Available from: 2016-12-27 Created: 2016-12-22 Last updated: 2017-11-29

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CiteExportLink to record
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Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf