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In-situ observation of self-cleansing phenomena during ultra-high vacuum anneal of transition metal nitride thin films: Prospects for non-destructive photoelectron spectroscopy
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0002-4898-5115
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0002-2837-3656
2016 (English)In: Applied Physics Letters, ISSN 0003-6951, E-ISSN 1077-3118, Vol. 109, no 21, 211602Article in journal (Refereed) Published
Abstract [en]

Self-cleansing of transition metal nitrides is discovered to take place during ultra-high vacuum annealing of TiN, NbN, and VN thin films. Native oxide layers from air exposure disappear after isothermal anneal at 1000 degrees C. Also, for TiN, the Ti 2p and N 1s X-ray photoelectron spectra (XPS) recorded after the anneal are identical to those obtained from in-situ grown and analyzed epitaxial TiN(001). These unexpected effects are explained by oxide decomposition in combination with N-replenishing of the nitride during recrystallization. The finding opens up new possibilities for true bonding assignments through non-destructive XPS analyses, thus avoiding artefacts from Ar etching. (C) 2016 Author(s).

Place, publisher, year, edition, pages
AMER INST PHYSICS , 2016. Vol. 109, no 21, 211602
National Category
Materials Chemistry
Identifiers
URN: urn:nbn:se:liu:diva-133521DOI: 10.1063/1.4968803ISI: 000388834200005OAI: oai:DiVA.org:liu-133521DiVA: diva2:1060885
Note

Funding Agencies|VINN Excellence Center Functional Nanoscale Materials (FunMat) [2005-02666]; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University (Faculty Grant SFO-Mat-LiU) [2009-00971]; Knut and Alice Wallenberg Foundation [2011.0143]; Aforsk Foundation [16-359]

Available from: 2016-12-30 Created: 2016-12-29 Last updated: 2017-01-25

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Greczynski, GrzegorzHultman, Lars
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