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SiC-FET sensors for selective and quantitative detection of VOCs down to ppb level
Linköping University, Department of Physics, Chemistry and Biology, Applied Sensor Science. Linköping University, Faculty of Science & Engineering. University of Oulu, Finland, SenSiC AB, Kista, Sweden .
Saarland University, Lab for Measurement Technology, Germany.
University of Oulu, Finland.
Linköping University, Department of Physics, Chemistry and Biology, Applied Sensor Science. Linköping University, Faculty of Science & Engineering. University of Oulu, Finland.
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2016 (English)In: Procedia Engineering, ISSN 1877-7058, E-ISSN 1877-7058, Vol. 168, p. 216-220Article in journal (Refereed) Published
Abstract [en]

With the increased interest in development of cheap, simple means for indoor air quality monitoring, and specifically in relation to certain well-known pollutant substances with adverse health effects even at very low concentrations, such as different Volatile Organic Compounds (VOCs), this contribution aims at providing an overview of the development status of the silicon carbide field effect transistor (SiC FET) based sensor platform for ppb level detection of VOCs. Optimizing the transducer design, the gas-sensitive material(s) composition, structure and processing, its mode of operation - applying temperature cycled operation in conjunction with multivariate data evaluation - and long-term performance it has been possible to demonstrate promising resultsregarding the sensor technology’s ability to achieve both single-digit ppb sensitivity towards e.g. naphthalene as well as selective detection of individual substances in a mixture of different VOCs.

Place, publisher, year, edition, pages
Elsevier, 2016. Vol. 168, p. 216-220
Keywords [en]
indoor air quality monitoring; field effect transistor gas sensors; silicon carbide; pulsed laser deposition; temperature cycl ed operation
National Category
Chemical Engineering
Identifiers
URN: urn:nbn:se:liu:diva-133977DOI: 10.1016/j.proeng.2016.11.165ISI: 000391641300052OAI: oai:DiVA.org:liu-133977DiVA, id: diva2:1066009
Conference
30th anniversary Eurosensors Conference – Eurosensors 2016, 4-7. Sepember 2016, Budapest, Hungary
Projects
SENSIndoor
Funder
EU, FP7, Seventh Framework Programme, 604311Available from: 2017-01-17 Created: 2017-01-17 Last updated: 2017-11-29Bibliographically approved

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Andersson, MikeBastuck, ManuelLloyd Spetz, AnitaPuglisi, Donatella
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