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V0.5Mo0.5Nx/MgO(001): Composition, nanostructure, and mechanical properties as a function of film growth temperature
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0002-4898-5115
Linköping University, Department of Physics, Chemistry and Biology. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0003-3277-1945
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology. University of Barcelona, Spain.
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2017 (English)In: Acta Materialia, ISSN 1359-6454, E-ISSN 1873-2453, Vol. 126, 194-201 p.Article in journal (Refereed) Published
Abstract [en]

V(0.5)Mo(0.5)Nx/MgO(001) alloys with the B1-NaCI structure are grown by ultra-high-vacuum reactive magnetron sputter deposition in 5 mTorr mixed Ar/N-2 atmospheres at temperatures T-s between 100 and 900 degrees C. Alloy films grown at T-s amp;lt;= 500 degrees C are polycrystalline with a strong 002 preferred orientation; layers grown at T-s amp;gt;= 700 degrees C are epitaxial single-crystals. The N/Metal composition ratio x ranges from 1.02 +/- 0.05 with T-s = 100-500 degrees C to 0.94 +/- 0.05 at 700 degrees C to 0.64 +/- 0.05 at T-s = 900 degrees C. N loss at higher growth temperatures leads to a corresponding decrease in the relaxed lattice parameter a(0) from 4.212 A with x = 1.02 to 4.175 angstrom at x = 0.94 to 4.120 angstrom with x = 0.64. V(0.5)Mo(0.5)Nx nanoindentation hardnesses H and elastic moduli E increase with increasing T-s, from 17 +/- 3 and 323 +/- 30 GPa at 100 degrees C to 26 +/- 1 and 370 +/- 10 GPa at 900 degrees C. Both polycrystalline and single-crystal V(0.5)Mo(0.5)Nx films exhibit higher toughnesses than that of the parent binary compound VN. V(0.5)Mo(0.5)Nx films deposited at higher Ts also exhibit enhanced wear resistance. Valence-band x-ray photoelectron spectroscopy analyses reveal an increased volume density of shear-sensitive d-t(2g) d-t(2g) metallic states for V(0.5)Mo(0.5)Nx compared to VN and the density of these orbitals increases with increasing deposition temperature, i.e., with increasing N-vacancy concentration.(C) 2016 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.

Place, publisher, year, edition, pages
PERGAMON-ELSEVIER SCIENCE LTD , 2017. Vol. 126, 194-201 p.
Keyword [en]
Toughness; Magnetron sputtering; Molybdenum; Vanadium; Transition-metal nitrides
National Category
Inorganic Chemistry
Identifiers
URN: urn:nbn:se:liu:diva-136605DOI: 10.1016/j.actamat.2016.12.048ISI: 000394918500019OAI: oai:DiVA.org:liu-136605DiVA: diva2:1089939
Note

Funding Agencies|Knut and Alice Wallenberg Foundation; Swedish Research Council; Swedish Government Strategic Research Area Grant in Materials Science (SFO Mat-LiU) on Advanced Functional Materials; VINN Excellence Center Functional Nanoscale Materials (FunMat) [2005-02666]

Available from: 2017-04-21 Created: 2017-04-21 Last updated: 2017-04-21

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Kindlund, HannaGreczynski, GrzegorzBroitman, EstebanMartinez de Olgoz, LeyreLu, JunJensen, JensPetrov, IvanGreene, Joseph EBirch, JensHultman, Lars
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