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Dislocation-pipe diffusion in nitride superlattices observed in direct atomic resolution
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
University of Calif Berkeley, CA 94720 USA.
Linköping University, Department of Physics, Chemistry and Biology. Linköping University, Faculty of Science & Engineering.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0002-2837-3656
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2017 (English)In: Scientific Reports, ISSN 2045-2322, E-ISSN 2045-2322, Vol. 7, 46092Article in journal (Refereed) Published
Abstract [en]

Device failure from diffusion short circuits in microelectronic components occurs via thermally induced migration of atoms along high-diffusivity paths: dislocations, grain boundaries, and free surfaces. Even well-annealed single-grain metallic films contain dislocation densities of about 1014 m-2; hence dislocation-pipe diffusion (DPD) becomes a major contribution at working temperatures. While its theoretical concept was established already in the 1950s and its contribution is commonly measured using indirect tracer, spectroscopy, or electrical methods, no direct observation of DPD at the atomic level has been reported. We present atomically-resolved electron microscopy images of the onset and progression of diffusion along threading dislocations in sequentially annealed nitride metal/semiconductor superlattices, and show that this type of diffusion can be independent of concentration gradients in the system but governed by the reduction of strain fields in the lattice.

Place, publisher, year, edition, pages
NATURE PUBLISHING GROUP , 2017. Vol. 7, 46092
National Category
Condensed Matter Physics
Identifiers
URN: urn:nbn:se:liu:diva-136860DOI: 10.1038/srep46092ISI: 000398550200001PubMedID: 28382949OAI: oai:DiVA.org:liu-136860DiVA: diva2:1092110
Note

Funding Agencies|Swedish Research Council [2013-4018, 2011-6505]; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University [SFO-Mat-LiU 2009-00971]; National Science Foundation; U.S.Department of Energy [CBET-1048616]

Available from: 2017-04-30 Created: 2017-04-30 Last updated: 2017-05-22

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