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Synthesis and properties of CSxFy thin films deposited by reactive magnetron sputtering in an Ar/SF6 discharge
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0002-9464-5111
Linköping University, Department of Physics, Chemistry and Biology. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0003-3277-1945
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
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2017 (English)In: Journal of Physics: Condensed Matter, ISSN 0953-8984, E-ISSN 1361-648X, Vol. 29, no 19, 195701Article in journal (Refereed) Published
Abstract [en]

A theoretical and experimental study on the growth and properties of a ternary carbon-based material, CSxFy, synthesized from SF6 and C as primary precursors is reported. The synthetic growth concept was applied to model the possible species resulting from the fragmentation of SF6 molecules and the recombination of S-F fragments with atomic C. The possible species were further evaluated for their contribution to the film growth. Corresponding solid CSxFy thin films were deposited by reactive direct current magnetron sputtering from a C target in a mixed Ar/SF6 discharge with different SF6 partial pressures (P-SF6). Properties of the films were determined by x-ray photoelectron spectroscopy, x-ray reflectivity, and nanoindentation. A reduced mass density in the CSxFy films is predicted due to incorporation of precursor species with a more pronounced steric effect, which also agrees with the low density values observed for the films. Increased P-SF6 leads to decreasing deposition rate and increasing density, as explained by enhanced fluorination and etching on the deposited surface by a larger concentration of F/F-2 species during the growth, as supported by an increment of the F relative content in the films. Mechanical properties indicating superelasticity were obtained from the film with lowest F content, implying a fullerene-like structure in CSxFy compounds.

Place, publisher, year, edition, pages
IOP PUBLISHING LTD , 2017. Vol. 29, no 19, 195701
Keyword [en]
magnetron sputtering; thin films; fullerene-like carbon; DFT calculations; sulfur hexafluoride SF6
National Category
Inorganic Chemistry
Identifiers
URN: urn:nbn:se:liu:diva-137077DOI: 10.1088/1361-648X/aa67d2ISI: 000399254900001PubMedID: 28319035OAI: oai:DiVA.org:liu-137077DiVA: diva2:1093295
Note

Funding Agencies|Swedish Foundation for Strategic Research (SSF) Synergy Grant on Functional Carbides and Advanced Surface Engineering (FUNCASE) [RMA11-0029]; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University [2009-00971]

Available from: 2017-05-05 Created: 2017-05-05 Last updated: 2017-05-29

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The full text will be freely available from 2018-04-05 16:16
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Lai, Chung-ChuanGoyenola, CeciliaBroitman, EstebanNäslund, Lars-ÅkeHögberg, HansHultman, LarsGueorguiev, Gueorgui KostovRosén, Johanna
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Thin Film PhysicsFaculty of Science & EngineeringDepartment of Physics, Chemistry and Biology
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