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Impact of B4C co-sputtering on structure and optical performance of Cr/Sc multilayer X-ray mirrors
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
SLAC National Accelerator Laboratory, 2575 Sand Hill Road, Menlo Park, California, USA.
Center for X-Ray Optics, Lawrence Berkeley National Lab, Berkeley, California, USA.
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2017 (English)In: Optics Express, ISSN 1094-4087, E-ISSN 1094-4087, Vol. 25, no 15, 18274-18287 p.Article in journal (Refereed) Published
Abstract [en]

The influence of B4C incorporation during magnetron sputter deposition of Cr/Sc multilayers intended for soft X-ray reflective optics is investigated. Chemical analysis suggests formation of metal: boride and carbide bonds which stabilize an amorphous layer structure, resulting in smoother interfaces and an increased reflectivity. A near-normal incidence reflectivity of 11.7%, corresponding to a 67% increase, is achieved at λ = 3.11 nm upon adding 23 at.% (B + C). The advantage is significant for the multilayer periods larger than 1.8 nm, where amorphization results in smaller interface widths, for example, giving 36% reflectance and 99.89% degree of polarization near Brewster angle for a multilayer polarizer. The modulated ion-energy-assistance during the growth is considered vital to avoid intermixing during the interface formation even when B + C are added.

Place, publisher, year, edition, pages
Optical Society of America, 2017. Vol. 25, no 15, 18274-18287 p.
National Category
Natural Sciences Inorganic Chemistry
Identifiers
URN: urn:nbn:se:liu:diva-139944DOI: 10.1364/oe.25.018274ISI: 000408584400128PubMedID: 28789315Scopus ID: 2-s2.0-85025823281OAI: oai:DiVA.org:liu-139944DiVA: diva2:1135067
Note

Funding agencies: Swedish Science Council; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University (Faculty Grant SFO-Mat-LiU) [2009 00971]

Available from: 2017-08-22 Created: 2017-08-22 Last updated: 2017-09-19Bibliographically approved

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The full text will be freely available from 2018-07-24 14:27
Available from 2018-07-24 14:27

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