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Multiple-layered effective medium approximation approach to modeling environmental effects on alumina passivated highly porous silicon nanostructured thin films measured by in-situ Mueller matrix ellipsometry
University of Nebraska Lincoln, NE USA.
University of Nebraska Lincoln, NE USA.
University of Nebraska Lincoln, NE USA; JA Woollam Co Inc, NE USA.
JA Woollam Co Inc, NE USA.
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2017 (English)In: Applied Surface Science, ISSN 0169-4332, E-ISSN 1873-5584, Vol. 421, p. 663-666Article in journal (Refereed) Published
Abstract [en]

Optical changes in alumina passivated highly porous silicon slanted columnar thin films during controlled exposure to toluene vapor are reported. Electron-beam evaporation glancing angle deposition and subsequent atomic layer deposition are utilized to deposit alumina passivated nanostructured porous silicon thin films. In-situ Mueller matrix generalized spectroscopic ellipsometry in an environmental cell is then used to determine changes in optical properties of the nanostructured thin films by inspection of individual Mueller matrix elements, each of which exhibit sensitivity to adsorption. The use of a multiple-layered effective medium approximation model allows for accurate description of the inhomogeneous nature of toluene adsorption onto alumina passivated highly porous silicon slanted columnar thin films. (C) 2016 Elsevier B.V. All rights reserved.

Place, publisher, year, edition, pages
ELSEVIER SCIENCE BV , 2017. Vol. 421, p. 663-666
Keywords [en]
Porous silicon; Ellipsometry; Mueller matrix; Adsorption; In-situa
National Category
Other Materials Engineering
Identifiers
URN: urn:nbn:se:liu:diva-141110DOI: 10.1016/j.apsusc.2016.10.004ISI: 000408756700062OAI: oai:DiVA.org:liu-141110DiVA, id: diva2:1144795
Note

Funding Agencies|National Science Foundation (NSF) through the Center for Nanohybrid Functional Materials [EPS-1004094]; Nebraska Materials Research Science and Engineering Center [DMR-1420645]; NSF [CMMI 1337856, EAR 1521428]; J.A. Woollam Foundation

Available from: 2017-09-27 Created: 2017-09-27 Last updated: 2018-01-12

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CiteExportLink to record
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Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
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  • en-US
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  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
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  • asciidoc
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