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Discharge state transition and cathode fall thickness evolution during chromium HiPIMS discharge
Chinese Academic Science, Peoples R China; Chinese Academic Science, Peoples R China.
Chinese Academic Science, Peoples R China; Chinese Academic Science, Peoples R China.
Chinese Academic Science, Peoples R China.
Chinese Academic Science, Peoples R China.
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2017 (English)In: Physics of Plasmas, ISSN 1070-664X, E-ISSN 1089-7674, Vol. 24, no 8, 083507Article in journal (Refereed) Published
Abstract [en]

The temporal evolutions of target voltage and current waveforms under different pulse voltage and working pressure conditions were studied during Cr high power impulse magnetron sputtering discharges. Target voltage and current characteristics demonstrated that when the pulse width was set as 200 mu s, HiPIMS discharge went through a four-stage sequence during each pulse, Townsend discharge, glow discharge, afterglow, and pulse-off stages. A discharge state transition in the glow discharge stage happened at high pulse voltage and working pressure conditions. Furthermore, the dependence of reduced cathode fall thickness pdcon pulse voltage, working pressure, and normalized current density j/p(2) was presented. It was found that gas rarefaction leads to a change of relationship between pd(c) and j/p(2). A noticeable increase of the cathode fall thickness caused by gas rarefaction has been found. Published by AIP Publishing.

Place, publisher, year, edition, pages
AMER INST PHYSICS , 2017. Vol. 24, no 8, 083507
National Category
Atom and Molecular Physics and Optics
Identifiers
URN: urn:nbn:se:liu:diva-141734DOI: 10.1063/1.4995482ISI: 000409232200091OAI: oai:DiVA.org:liu-141734DiVA: diva2:1147296
Note

Funding Agencies|National Natural Science Foundation of China [51522106, 5151101342]; State Key Project of Fundamental Research of China [2013CB632302, 2017YFB0702300]; Zhejiang Key Research and Development Program [2017C01001]

Available from: 2017-10-05 Created: 2017-10-05 Last updated: 2017-10-05

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  • harvard1
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  • vancouver
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  • Other style
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  • de-DE
  • en-GB
  • en-US
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  • nn-NB
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  • Other locale
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