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One-step synthesis of polycrystalline V2AlC thin films on amorphous substrates by magnetron co-sputtering
Chinese Academic Science, Peoples R China; University of Chinese Academic Science, Peoples R China.
Chinese Academic Science, Peoples R China.
Chinese Academic Science, Peoples R China.
Chinese Academic Science, Peoples R China.
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2017 (English)In: Vacuum, ISSN 0042-207X, E-ISSN 1879-2715, Vol. 146, p. 106-110Article in journal (Refereed) Published
Abstract [en]

We prepared V-Al-C films on glass and silicon (with native SiO2 layer) substrates using magnetron co-sputtering at 600 degrees C. The composition and microstructure of these films were characterized by Rutherford backscattering spectrometry, X-ray diffraction, Raman spectroscopy, and transmission electron microscopy. Polycrystalline V2AlC phase was obtained in the films with nearly stoichiometric composition. The microstructural evolution includes random nucleation at the film/substrate interface, competitive growth resulting in a (110) preferred orientation with increasing thickness. The mechanism for crystallization could be understood in terms of polymorphic crystallization. The results show that polycrystalline MAX-phase V2AlC could be directly synthesized on amorphous substrates. (C) 2017 Elsevier Ltd. All rights reserved.

Place, publisher, year, edition, pages
PERGAMON-ELSEVIER SCIENCE LTD , 2017. Vol. 146, p. 106-110
Keywords [en]
MAX phases; Magnetron co-sputtering; Non-epitaxial growth; Preferred orientation; Polymorphic crystallization
National Category
Inorganic Chemistry
Identifiers
URN: urn:nbn:se:liu:diva-143631DOI: 10.1016/j.vacuum.2017.08.049ISI: 000416184600016OAI: oai:DiVA.org:liu-143631DiVA, id: diva2:1165569
Conference
Fall Meeting of the European-Materials-Research-Society (E-MRS Fall)
Note

Funding Agencies|National Natural Science Foundation of China [91226202, 91426304]; "Strategic Priority Research Program" of the Chinese Academy of Sciences [XDA 02040105, XDA03010305]; Major Project of the Ministry of Science and Technology of China [2015 ZX06004-001]; Swedish Foundation for Strategic Research through the Future Research Leaders 5 program; Synergy Grant FUNCASE

Available from: 2017-12-13 Created: 2017-12-13 Last updated: 2018-01-03

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The full text will be freely available from 2019-09-18 10:06
Available from 2019-09-18 10:06

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CiteExportLink to record
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Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
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  • Other locale
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Output format
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