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Multilayer X-ray mirrors for water window wavelengths
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
2001 (English)Licentiate thesis, comprehensive summary (Other academic)
Abstract [en]

This thesis describes the design, growth and x-ray characterization of normal incidence multilayer x-ray mirrors. The mirrors are intended as condenser optics for soft x-ray microcsopy in the water window.

A droplet-target laser-plasma soft x-ray source has been developed to be used in a compact soft x-ray microscope. The microscope operates at the wavelength λ=3.37 4 nm, corresponding to the C VI emission line from a laser plasma x-ray source. Due to the isotropic nature of laser-produced plasma sources, large shaped, normal incidence condenser mirrors collecting x-rays over a large solid angle from the source, and focusing them onto the specimen, are required.

Since ordinary refractive optics cannot be utilized in this wavelength range, so called multilayer interference structures, based on diffraction and reflection, have been developed.

The multilayers were designed to have the maximal theoretical normal reflection of the first and second order of λ=3 .374 nm using the IMD computer software. The realization of the multilayers were accomplished using ion-assisted dual target DC magnetron sputtering. To characterize the multilayers and improve the deposition process hard x-ray reflectivity was used. Further, at-wavelength (λ=3 .37 4 nm) reflectivity measurements were carried out using a reflectometer based on the laser-plasma source. In addition, measurements have been performed using synchrotron radiation at the Advanced Light Source (ALS) in Berkeley.

Place, publisher, year, edition, pages
Linköping: Linköpings universitet , 2001. , p. 66
Series
Linköping Studies in Science and Technology. Thesis, ISSN 0280-7971 ; 923
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-145968Local ID: LiU-Tek-Lic-2001:2ISBN: 9173732346 (print)OAI: oai:DiVA.org:liu-145968DiVA, id: diva2:1194615
Available from: 2018-04-03 Created: 2018-04-03 Last updated: 2018-12-04Bibliographically approved

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Eriksson, Fredrik

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CiteExportLink to record
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Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf