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Structure and properties of Si-C-N and B-C-N thin films prepared by magnetron sputtering
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
2000 (English)Licentiate thesis, comprehensive summary (Other academic)
Abstract [en]

Carbon nitride-based materials, grown by magnetron sputtering have been studied concerning microstructure and mechanical properties. Carbon nitride was alloyed with Si or B, and grown as a constituent in a layered structure. Si-C-N thin films have been deposited by reactive co-sputtering of C and Si targets and the composition, microstructure, mechanical response, as well as wetting behavior have been examined. The microstructure of these films showed to be amorphous-to-graphite-like for binary SiC and ternary SiCN with low Si content. For ternaries with "high" Si content a nanostructured material was observed, containing 2-20 nm-sized crystallites in an amorphous matrix. A small addition of Si have shown to affect the wettability of CNx, displaying contact angle values similar to what has been reported for Si-doped DLC. High hardness but less elasticity as compared to CNx has been noticed. B-C-N thin films were grown by reactive magnetron co-sputtering at low substrate-temperature. The microstructure and indentation response of these films have been studied. A large area of the B-C-N compositional diagram was covered by reactive co-sputtering of graphite and B4C-targets. The B-C-N films were shown to exhibit fullerene-like microstructure, regardless of composition. The films showed high elasticity, comparable to what has been reported for CNx films grown under similar conditions. CN0.33/BN:C multilayers have been grown by sequential magnetron sputtering. The films exhibited a fullerene-like microstructure, consisting of curved and cross-linked basal planes, which were found to be continuous over the interfaces of the layers. Multilayers of CN0.33/BN:C reached improved values of displacement and elastic recovery compared to what was found for single-layer CN0.33 and BN:C films grown under comparable conditions.

Place, publisher, year, edition, pages
Linköping: Linköpings universitet , 2000. , p. 27
Series
Linköping Studies in Science and Technology. Thesis, ISSN 0280-7971 ; 816
National Category
Natural Sciences
Identifiers
URN: urn:nbn:se:liu:diva-145941Local ID: LiU-TEK-LIC-2000:12ISBN: 9172196920 (print)OAI: oai:DiVA.org:liu-145941DiVA, id: diva2:1199850
Available from: 2018-04-23 Created: 2018-04-23 Last updated: 2018-11-06Bibliographically approved

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Berlind, Torun

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CiteExportLink to record
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Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
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  • Other style
More styles
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  • de-DE
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  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
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  • asciidoc
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